An MEMS heating chip integrating multiple Pt temperature sensors and a manufacture method therefor

Abstract

The invention provides an MEMS heating chip integrating multiple Pt thin film resistor temperature sensors. The MEMS heating chip comprises a first substrate (1-1) and a second substrate (1-2). The front side of the first substrate is provided with a concave micro-cavity body (2); a micro-through hole (3) penetrating through the first substrate (1-1) is formed in the micro-cavity body (2); the back side of the second substrate (1-2) is provided with a micro-channel array (4) perpendicular to the back side thereof; the central area of the front side is provided with a multi-hole structure (5) perpendicular to the front side thereof; the micro-channel array (4) communicates with the multi-hole structure (5); the surface of the front side of the second substrate is provided with a plurality of Pt thin film resistor temperature sensors (6); the front side of the first substrate (1-1) and the back side of the second substrate (1-2) are bonded together. The invention also provides a manufacture method for the heating chip. The temperature of the heating chip can be measured in real time and the problem of inaccurate temperature measurement can be effectively avoided.

Description

technical field [0001] The invention relates to the technical field of electronic cigarettes, in particular to a MEMS electronic cigarette heating chip integrating a plurality of Pt thin film resistance temperature sensors and a manufacturing method thereof. Background technique [0002] Most commercially available e-cigarettes use a heating wire as a heating element. In the power supply state, the heating wire heats the e-liquid through the high heat generated by electrothermal conversion to atomize it. Due to the spiral structure of the heating wire itself and the way the oil guide is wound on it, it is inevitable that the heating wire will experience local high temperature during operation. E-liquid components and oil-conducting materials will change in physical and chemical properties when the temperature of the e-cigarette is too high, and harmful cracking products may be produced; at high temperatures, some aroma components in the e-liquid will be destroyed, affecting ...

AI Technical Summary

Problems solved by technology

This temperature control method does not use a temperature sensor to detect the temperature, but calculates the temperature information through the electronic cigarette host chip to calculate the change of the resistance of the heating wire. Therefore, in fact, the current temperature control of the electronic cigarette is based on the change of the resistance of the heating wire The basis is not judged by the actual temperature. As a result, the accuracy of the temperature is directly related to the accuracy of the resistance value. If the initial resistance value detected by the chip is not accurate, the temperature calculated according to the temperature coefficient of resistance will not be Accurate, if the base is wrong, the whole calculation is wrong

In addition, this temperature control method still has the following problems: the resistance value of the heating wire can only reflect the overall temperature situation, and when the local temperature is too high, it cannot be effectively monitored; secondly, during use, the heating wire will be aging due to high temperature, Oxidation and other reasons lead to changes in resistance, which will lead to larger and larger temperature measurement errors

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