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Microfluid sensing device and method for fabricating the same

A sensing element and microfluidic technology, which is applied in the direction of fluid velocity measurement, electrical components, optical components, etc., can solve the problems of complex process steps and miniaturization of components that do not meet the requirements, so as to simplify process steps, reduce manual operation costs, reduce The effect of dosage

Active Publication Date: 2018-06-22
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Not only is the process more complicated, but it also does not conform to the trend of miniaturization of components

Method used

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  • Microfluid sensing device and method for fabricating the same
  • Microfluid sensing device and method for fabricating the same
  • Microfluid sensing device and method for fabricating the same

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Embodiment Construction

[0036] This specification provides a method for fabricating a microfluidic sensing element, which can simplify the process steps of the microfluidic sensing element and greatly reduce the size of the microfluidic sensing element. In order to make the above-mentioned embodiments and other objects, features and advantages of the present specification more obvious and easy to understand, several preferred embodiments are listed below and described in detail with the accompanying drawings.

[0037] However, it must be noted that these specific implementation cases and methods are not intended to limit the present invention. The present invention may still be practiced with other features, components, methods and parameters. The preferred embodiments are provided only to illustrate the technical features of the present invention, and not to limit the claims of the present invention. Those with ordinary knowledge in the technical field will be able to make equivalent modifications ...

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Abstract

A microfluid sensing device used to measure photo-electronic properties of a liquid includes a substrate, a patterned conductive layer, a hydrophobic layer, a photodiode layer, a transparent electrodelayer and a control circuit. The patterned conductive layer is disposed on the substrate and has a first electrode, a second electrode and a third electrode adjacent to but separated with each otherand arranged in sequence. The hydrophobic layer overlapped with the first and the second electrodes is used for carry the liquid. The photodiode layer is disposed on and directly in contact with the third electrode. The control circuit is connected to the first, the second and the third electrodes, by which the liquid can be drove to move over the hydrophobic layer and the photodiode layer.

Description

technical field [0001] The present invention relates to a biological micro-electromechanical system and its manufacturing method, in particular to a microfluidic sensing element. Background technique [0002] Bioinformatics uses methods such as applied mathematics, informatics, statistics and computer science to collect, screen, process and utilize various biological data. In the process of collecting, screening, processing and utilizing biological information, the preparation and analysis of biological samples require considerable manpower and time. How to achieve high selectivity, high sensitivity and rapid detection in complex samples with minimal preparation steps (simple) has become a major challenge in the industry. [0003] Biomedical microelectromechanical systems (Bio-MEMS) is the application of MEMS technology in the field of life sciences, which has the advantages of short analysis time, low sample consumption, automation, rapid parallel analysis and disposable. ...

Claims

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Application Information

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IPC IPC(8): G01N21/64B81B7/02B81B7/00B81C1/00
CPCG01N21/64B81B7/0009B81B7/02B81C1/00222
Inventor 贾立凱王伟训粘瀚升侍育徵廖啟宏章钧
Owner AU OPTRONICS CORP
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