Blood oxygen detector detection unit and probe and making method of probe
A detection unit and detector technology, applied in the direction of sensors, optical sensors, diagnostic recording/measurement, etc., can solve the problem that the signal has a greater sensitivity to human motion, the requirements for the stability of the monitoring object are very high, and the measuring instrument is bulky. and other problems to achieve the effect of saving materials, reducing height, and improving signal strength
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[0111] Figure 4 A schematic diagram of growing an epitaxial structure on a substrate in the preparation method provided in this embodiment. Figure 5 In the preparation method provided for this embodiment, a schematic diagram of setting a first mask on the epitaxial structure. Figure 6 A schematic diagram of etching the epitaxial structure down to the P-type electrode layer in the preparation method provided in this embodiment. Figure 7 In the preparation method provided for this embodiment, a schematic diagram of setting a second mask on the epitaxial structure after the P-type electrode layer has been etched. Figure 8 In the preparation method provided for this embodiment, a schematic diagram of etching the epitaxy to the bottom N-type electrode layer. Figure 9 In the preparation method provided for this embodiment, a schematic diagram of setting a third mask on the epitaxial structure etched to the bottom N-type electrode layer. Figure 10 In the preparation method ...
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