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Graphene trace hydrogen gas sensor

A technology of graphene and hydrogen gas, applied in the field of sensors

Inactive Publication Date: 2018-07-03
CHONGQING UNIV OF ARTS & SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As far as we know, no one has targeted H 2 A gas sensor based on Pt-catalyzed porous silicon-doped graphitic silicon

Method used

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Experimental program
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Embodiment Construction

[0019] A gas sensor structure based on Pt-catalyzed porous silicon-doped graphene was fabricated by simple titration, electrochemical etching, metal-assisted chemical etching, and ion beam sputtering. The production process proceeds in the following steps:

[0020] First, silicon substrate selection. A Si wafer with a length of 10 mm, a width of 5 mm, a thickness of 300 microns, a resistance value of 1-10Ω, and a crystal orientation is selected.

[0021] Then, a porous silicon substrate is fabricated. Pt (with a purity of 99.99%) was sputtered on the surface of a silicon wafer as a catalyst by ion beam sputtering. Then, put the silicon chip sputtered with Pt into the heating furnace, and keep it warm at 650 ° for about 1 hour, so that the surface layer of the silicon chip is infiltrated with Pt metal particles with a thickness of about 12 microns, and the size of the infiltrated Pt particles is 30-60nm . Finally, the electrochemical etching method is used to etch the surf...

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Abstract

The invention relates to a sensor used for detecting content of trace hydrogen gas. The sensor is characterized by comprising a silicon basal layer, a porous silicon layer, a platinum seeping particlecatalyst layer and a graphene sensing region. When the thickness of the silicon basal layer is 0.8-1.2mm, the thickness of the porous silicon layer is 1.4-1.6mm, the thickness of the platinum seepingparticle catalyst layer is 10-14 microns, the width of the graphene sensing region is 0.8-1.2mm and the area of the graphene sensing region is (0.8-1.2)*5 square millimeters, hydrogen gas concentration varies in a range of 0-1000ppm, resistance variation of the sensor reaches 2.0 ohms, and the average sensitivity is 15%. Especially when the thickness of the silicon basal layer is 1.0mm, the thickness of the porous silicon layer is 1.5mm, the thickness of the platinum seeping particle catalyst layer is 12 microns, the width of the graphene sensing region is 1.0mm and the area of the graphene sensing region is 1*5 square millimeters, the resistance variation of the sensor reaches 2.4 ohms, and the average sensitivity reaches 24%.

Description

technical field [0001] This patent relates to the sensor field, especially a kind of for trace hydrogen (H 2 ) gas sensor based on platinum (Pt) catalyzed porous silicon doped graphite silicon for gas content detection. Background technique [0002] In recent years, with the advancement of science and technology, all walks of life require higher sensitivity, higher precision, faster and more efficient detection and detection of various gases, especially for the detection of flammable, explosive, toxic and harmful gases. , which puts forward higher requirements for gas sensors. [0003] Due to the increasing requirements for the sensitivity, precision and stability of gas sensors in the fields of national defense technology, aerospace, industrial production, environmental monitoring and national security, the research and development of gas sensors is becoming more and more important. Under normal temperature and pressure, hydrogen is a flammable, explosive, colorless, tran...

Claims

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Application Information

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IPC IPC(8): G01N27/12
CPCG01N27/125
Inventor 赵华君袁代蓉
Owner CHONGQING UNIV OF ARTS & SCI