Micro-channel plate with high detection efficiency and low noise and fabrication method of micro-channel plate

A technology of microchannel plate and microhole array, which is applied in the manufacture of light-emitting cathodes, secondary emitter electrodes, detailed information of electron multipliers, etc., can solve the problems of reduced detection efficiency and achieve improved gain performance, improved detection efficiency, and detection high efficiency effect

Active Publication Date: 2018-07-13
CHINA BUILDING MATERIALS ACAD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Their appearance not only protects the photocathode, but also improves the signal-to-noise ratio, but at the same time, it also blocks part of the sign

Method used

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preparation example Construction

[0029] The present invention also provides a method for preparing a microchannel plate, comprising: obtaining a quartz glass microhole array; sequentially depositing a conductive layer and an emission layer on the hole walls of the quartz glass microhole array; depositing the conductive layer and The two ends of the quartz glass micropore array of the emission layer are respectively plated with an input electrode and an output electrode; an organic film is attached to one end of the input electrode; a copper film is plated on the organic film; and the organic film is pyrolyzed , to remove the organic film, so that the copper film stays at the input electrode end; deposit a graphene film; dissolve the copper film and dry to obtain a microchannel plate with a graphene film attached.

[0030] Among them, the preparation method of the quartz glass microwell array is to draw a large-sized precision-shaped quartz glass tube through a wire drawing furnace into a thin tube, arrange the...

Embodiment

[0040] This embodiment provides a method for preparing a microchannel plate with high detection efficiency and low noise.

[0041] (1) Use a wire drawing furnace to draw a quartz glass tube with an outer diameter of 36mm and a wall thickness of 3mm into a thin tube with an outer diameter of 1.44mm. The temperature of the wire drawing furnace is 1600-1900°C; the 1.44mm thin tubes are tightly packed and arranged into a size of 30mm across the side The hexagonal cylindrical primary rod is drawn into a primary wire with an opposite side of 0.5mm through a wire drawing furnace. A quartz tube with an outer diameter of 62.5mm forms a secondary rod, and the secondary rod is drawn into a rough rod with a micropore array with an outer diameter of 25mm through a wire drawing furnace. microwell array.

[0042] (2) A layer of ZnO is first deposited as a conductive layer on the wall of the quartz glass micropore array by atomic layer deposition technology, the gas source is diethyl zinc (D...

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Abstract

The invention relates to a micro-channel plate with high detection efficiency and low noise and a fabrication method of the micro-channel plate. The micro-channel plate comprises a quartz glass micropore array, an input electrode, an output electrode and an ion feedback prevention film, wherein a conductive layer and an emission layer are sequentially deposited on a hole wall of the quartz glass micropore array, and the ion feedback prevention film is arranged at one side of the input electrode and is a graphene film. A graphene film layer is used as the ion feedback prevention film and can beangstrom level, the ion feedback phenomenon can be prevented, meanwhile, the detection efficiency of the micro-channel plate is improved, and the gain performance of the micro-channel plate is improved.

Description

technical field [0001] The invention relates to a microchannel plate, in particular to a microchannel plate with high detection efficiency and low noise and a preparation method thereof. Background technique [0002] Microchannel Plate (MCP) is a sheet-type electron multiplier array composed of millions of micron-scale glass channels. With its advantages of small size, light weight, high spatial and temporal resolution, etc. It has been widely used in fields such as vision, particle detection, and medical diagnosis and treatment. The United States successfully developed the first micro-channel plate in the early 1970s. After decades of development, the second-generation, super-second-generation, and third-generation micro-channel plates were successively developed. [0003] When the micro-channel plate is working, the incident electrons enter the micro-channel plate, and after multiple electron multiplications, a high-density electron cloud is formed at the outlet of the mi...

Claims

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Application Information

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IPC IPC(8): H01J43/24H01J9/12
CPCH01J9/125H01J43/246
Inventor 贾金升孙勇侯伟杰张兵强张洋徐滔
Owner CHINA BUILDING MATERIALS ACAD
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