Black silicon nano-pin photodetector structure and its preparation method

Abstract

The invention provides a structure and a preparation method of a black silicon nanometer PIN photoelectric detector, wherein the structure of the black silicon nanometer PIN photoelectric detector comprises a front surface metal electrode, a front surface anti-reflection film, a front surface silicon oxide film, a front surface N-type heavily doped zone, a P-type crystal silicon substrate, a backsurface P-type heavily doped zone, and a back surface metal electrode from the top to bottom in sequence, wherein the black silicon nanometer structure is adopted by the front surface N-type heavily doped zone. By virtue of the structure and the preparation method of the black silicon nanometer PIN photoelectric detector, the breakdown voltage of the detector is greatly improved and acquisition ofhigher spectral response can be facilitated.

Description

technical field [0001] The disclosure relates to the technical field of silicon-based photodetectors, in particular to a black silicon nano-PIN photodetector structure and a preparation method thereof. Background technique [0002] Semiconductor detectors play an important and irreplaceable role in both military and civilian use. The products are used in a large amount and have a wide range. Taking silicon-based PIN structure photodetectors as an example, they are widely used in security inspection equipment in Beijing subways. Imaging systems rely on silicon-based PIN photodetectors, as well as remote controls such as refrigerators and TVs in homes, imaging systems in CT equipment in hospitals, and so on. However, my country's semiconductor detectors mainly rely on imports. Whether it is high-end or low-end products, it seriously restricts my country's national defense capabilities in the military, limits my country's ability to explore the frontiers of science and technolo...

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Problems solved by technology

However, my country's semiconductor detectors mainly rely on imports. Whether it is high-end or low-end products, it seriously restricts my country's national defense capabilities in the military, limits my country's ability to explore the frontiers of science and technology in terms of high-tech development, and greatly increases the number of ordinary people in terms of civilian use. economic burden

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