Optical body, master, and method for manufacturing optical body
A technology of optical bodies and structures, applied in the field of optical bodies, to achieve the effect of improved anti-reflection characteristics and easy production
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Embodiment 1
[0155] (1-1. Fabrication of Optical Body)
[0156] In Example 1, the original disc 100 is fabricated through the following steps. A flat master substrate 110 made of thermal silicon oxide is prepared. Subsequently, a positive-type resist material is spin-coated on the master substrate 110 to form a substrate resist layer on the master substrate 110 . Here, a metal oxide resist containing tungsten (W) is used as the resist material.
[0157] Subsequently, a latent image in the shape of a regular hexagonal lattice is formed on the base resist layer by using the exposure device 200 . Here, the wavelength of the laser light 200A is set to 405 nm, and the NA of the objective lens 223 is set to 0.85. In addition, the pulse waveform of laser light 200A is shown in Figure 11 . In addition, the output level Iw of the high output pulse P1 is set to 9.5MW / cm 2 (the output level per unit area of the substrate resist layer), the output level Ib1 of the low output pulse P2 was set ...
Embodiment 2
[0173] (2-1. Fabrication of Optical Body)
[0174] Except having changed the conditions at the time of producing the optical body 10 as follows, the same process as Example 1 was implemented, and the optical body 10 was produced. Specifically, the pulse waveform of laser light 200A is shown in Figure 12 . In addition, the output level Iw of the high output pulse P1 is set to 9.5MW / cm 2 , the output level Ib1 of the low output pulse P2 is set to 1.6MW / cm 2 . In addition, the output time t2 of the high output pulse P1 is set to 24 ns, and the output time t3 of the low output pulse P2 is set to 2×t1−t2=16 ns.
[0175] (2-2. Characteristic evaluation)
[0176] The surface structure of the optical body 10 was confirmed by SEM and TEM. As a result, it was confirmed that the uneven structure 12 was formed on the surface of the optical body 10 . In addition, the absence of the concavo-convex structure 12 was hardly confirmed. Therefore, it can be confirmed that the transfer p...
Embodiment 3
[0198] (5-1. Fabrication of Optical Body)
[0199] The optical body 10 was produced by implementing the same process as Example 2 except having performed exposure while changing the output time t2 of the high output pulse P1 randomly between 22-25 ns.
[0200] (5-2. Characteristic evaluation)
[0201] The surface structure of the optical body 10 was confirmed by SEM and TEM. SEM photographs are shown in Figure 21 . As a result, it was confirmed that the uneven structure 12 was formed on the surface of the optical body 10 . In addition, the absence of the concavo-convex structure 12 was hardly confirmed. Therefore, it can be confirmed that the transfer property of the original disk 100 is good. In addition, in Example 4, irregularities are arranged randomly. Here, a combination of a plurality of adjacent protrusions 13 is picked up, and the arithmetic mean of their pitches is calculated as the average period. As a result, the average period was 250 nm.
[0202] In addi...
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