Method for manufacturing filter containing single-crystal piezoelectric radio-frequency resonators

A resonator and filter technology, applied in power oscillators, equipment and instruments that generate/process RF signals by optical methods, etc., can solve problems such as film cracks and differences in thermal expansion coefficients

Active Publication Date: 2018-08-03
ZHUHAI CRYSTAL RESONANCE TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Even so, there is still a large difference in the coefficient of thermal expansion (CTE) between the AlGaN film and the silicon substrate, which may cause the epitaxial layer to bear tension at room temperature, and these residual pressures may cause cracks in the film

Method used

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  • Method for manufacturing filter containing single-crystal piezoelectric radio-frequency resonators
  • Method for manufacturing filter containing single-crystal piezoelectric radio-frequency resonators
  • Method for manufacturing filter containing single-crystal piezoelectric radio-frequency resonators

Examples

Experimental program
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Embodiment Construction

[0196] Combine figure 1 And manufacturing process Figure 8 , The design details of the composite FBAR filter module will be described in detail. It is composed of several single crystal piezoelectric resonators, the piezoelectric material is Ba x Sr (1-x) TiO 3 (BST), AlN or Al x Ga (1-x) N.

[0197] figure 1 Shown is the schematic diagram of the composite FBAR filter module 5. The filter module 5 is composed of a plurality of composite FBAR resonators arranged and combined in a semi-ladder type, a semi-lattice type or a combined type. The composite FBAR resonator contains the constituent material Ba x Sr (1-x) TiO 3 (BST), AlN, Al x Ga (1-x) N or Sc x Al (1-x) N piezoelectric film 18', 18", the materials between them are SiO2, Si 3 N 4 , Ta 2 O 5 , Polyimide or benzocyclobutene (BCB) insulation material 54 is separated, and is sandwiched between two electrodes 22, 60.

[0198] Sc x Al (1-x) N piezoelectric films 18', 18" are usually C-axis oriented and usually 0.05≤x≤0.25, and p...

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Abstract

The invention relates to a method for manufacturing a filter containing single-crystal piezoelectric radio-frequency (RF) resonators. The method comprises the following steps: acquiring one removablecarrier with a releasing layer; manufacturing a piezoelectric film on the releasing layer; depositing a first electrode layer on the piezoelectric film; manufacturing a back film on a silicon cover; attaching a wafer back film onto an electrode; separating the removable carrier; necessarily measuring piezoelectricity and modification; selectively corroding the piezoelectric film to form an island;corroding a coating and a silicon crystal film in order to form SiO2; coating a passivation layer above a corrosive groove and around and above a piezoelectric island; applying a top electrode; adding a coupler used for connecting an adapter plate; selectively removing electrode material in order to leave out coupled resonators; manufacturing a gasket; peeling the silicon cover; manufacturing a cavity in SOI (otherwise using the SOI having the cavity); cutting; acquiring the adapter plate; manufacturing an epoxy resin dam structure; and connecting the resonators onto a substrate of the adapter plate (a flip-chip); encapsulation and separation.

Description

Technical field [0001] The invention relates to a preparation method of a single crystal piezoelectric radio frequency resonator and a filter. Background technique [0002] Mobile phone users require high-quality signal reception and transmission in a wider area. The quality of radio frequency (RF) signals depends on the radio frequency filter in the mobile phone. Each RF filter can conduct specific frequencies and block other unwanted frequencies. This feature makes frequency band selection possible and allows the mobile phone to only process certain signals specified. [0003] It is believed that by 2020, technologies such as carrier aggregation, 5G, and 4x4MIMO will become mainstream applications. By then, the number of filters in mobile phones will increase to as many as 100, and the global filter market will have an annual demand of 200 billion. [0004] Acoustic resonators are the basic components of radio frequency filters and sensors, and generally contain piezoelectric elec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H3/007H03H3/02H03H3/04
CPCH03H3/0073H03H3/0075H03H3/0076H03H3/02H03H3/04H03H2003/027H03H2003/023H03H2003/0414H03H9/02118H03H9/0523H03H9/1014H03H9/587H03H9/588H03H9/605H03H2003/021G02F1/353G02F1/39H03H9/562H03H9/02228H01S3/0092H03B17/00H04B2210/006
Inventor 不公告发明人
Owner ZHUHAI CRYSTAL RESONANCE TECH CO LTD
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