Preparation method of metal microneedle array negative mold
A microneedle array and mold technology, which is applied in the direction of microneedles, needles, and medical devices, can solve the problems of easy deformation of polymer female molds, difficult processing technology, and difficult control of precision, etc., and achieves easy mass replication and preparation Microneedle array membrane, low processing cost, and stable physical properties
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[0034] figure 1 It is a schematic diagram of the male microneedle array mold in the metal microneedle array female mold preparation process of the present invention; figure 2 It is a schematic diagram of the anti-adhesion layer and the metal seed layer coated on the surface of the microneedle array male mold in the metal microneedle array female mold process of the present invention; image 3 A schematic diagram of electroplating (or electroless plating or electroplating) the metal layer for the microneedle array positive mold surface coated with the anti-bonding layer and the metal seed layer; Figure 4 It is a schematic diagram of the metal microneedle array female mold process of the present invention coated with an adhesive layer on the surface of the female mold metal layer; Figure 5 It is the overall schematic diagram after adding the reinforcement layer in the metal microneedle array negative mold process of the present invention; Figure 6 In the metal microneedle ...
Embodiment 2
[0064] In this embodiment, the male mold of the microneedle array is prepared by MEMS (micromechanical microelectromechanical system). The material is various silicon substrates, the thickness is 200μm-3000μm, the microneedle diameter is 0.001μm-5000μm, and the microneedle height is 0.001μm-10,000μm. The material of this embodiment is preferably a double-polished single crystal silicon wafer, the diameter of the microneedle is 200 μm, and the height of the microneedle is 300 μm.
[0065] The shape of the microneedle in this embodiment is a square pointed cone. In order to ensure the density of the microneedle array, the distance between the microneedles in this embodiment is 400 μm.
[0066] In this embodiment, the anti-adhesion layer is a perfluoroalkoxy resin with a thickness of 100 nm.
[0067] In this embodiment, the material of the metal seed is Cr / Cu, and the thickness is 30 / 80 nm.
[0068] In this embodiment, it is preferably Cu, and the thickness is 2mm.
[0069] T...
Embodiment 3
[0092] The microneedle array positive mold is prepared by ultra-precision mechanical method. The material is glass, such as: quartz glass, ordinary silicate glass, etc., the diameter of the microneedle is 0.001 μm to 5,000 μm, and the height of the microneedle is 0.001 μm to 10,000 μm. The material used in this embodiment is ordinary silicate exfoliation, etc., the diameter of the microneedle is 50 μm, and the height of the microneedle is 150 μm.
[0093] In this embodiment, the microneedle is a hexagonal pointed cone.
[0094] The distance between the microneedles in this embodiment is 150 μm.
[0095] The anti-adhesion layer in this embodiment is an ethylene-tetrafluoroethylene copolymer with a thickness of 80 nm.
[0096] In this embodiment, the material of the metal seed is Cr / Ti, and the thickness is 30 / 50 nm.
[0097] In this embodiment, the female metal layer is Ni with a thickness of 0.5 mm.
[0098] In this embodiment, glass glue is selected as the bonding layer, a...
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Abstract
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