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A kind of preparation method of secondary ion probe sample target

A secondary ion and sample target technology, which is applied in the field of instrument analysis, can solve problems such as the impact of analysis accuracy, and achieve the effect of improving flatness

Inactive Publication Date: 2020-03-24
INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

In addition, stable isotope analysis has high requirements on the vacuum in the sample chamber. When the vacuum is poor, interference ions mainly hydrides will often be added, which will affect the analysis accuracy.
For example, in oxygen isotope analysis, 16 Oh - will 17 o - have a greater impact, thereby affecting 17 O / 16 O isotope ratio data

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Embodiment Construction

[0021] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0022] On the contrary, the invention covers any alternatives, modifications, equivalent methods and schemes within the spirit and scope of the invention as defined by the claims. Further, in order to make the public have a better understanding of the present invention, some specific details are described in detail in the detailed description of the present invention below. The present invention can be fully understood by those skilled in the art without the description of these detailed parts.

[0023] 1. The principle of secondary ion probe stable isotope analysis

[0024] attached figure 1 Sc...

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Abstract

The invention belongs to the field of analysis and test of secondary ion probes, and particularly relates to a preparation method of a secondary ion probe sample target, for improving flatness of sample grains and reducing outgassing rate of the sample target. The sample target mainly comprises a glass sheet, epoxy resin and sample grains. The preparation method, based on a main body, namely a circular glass sheet, includes the steps of firstly, cutting to form a plurality of grooves on the glass sheet, placing the sample grains in the grooves, injecting the epoxy resin into the grooves to cure, and carrying out fine grinding and polishing on the sample target after finishing curing. The preparation method has the advantages that the outgassing rate of the sample target is low due to the fact that the epoxy resin is placed in the grooves of the glass sheet only, and accordingly vacuum keeping of a sample chamber is facilitated; since glass and mineral grains(such as zircon and apatite)have the similar hardness, the mineral grains, the epoxy resin and the glass sheet are kept at the same plane effectively during the polishing, and further flatness of edges of the mineral grains areimproved.

Description

technical field [0001] The invention belongs to the field of instrument analysis methods, and in particular relates to a method for preparing a sample target of a secondary ion probe, which is mainly used for improving the flatness of mineral particles and reducing the outgassing rate of samples in vacuum. Background technique [0002] An ion probe is an instrument that uses primary ions to bombard a sample to generate secondary ions and perform mass spectrometry. It can perform high-precision micro-area in-situ element and isotope analysis on solid or thin film substances. The high-precision quantitative ion probe currently used in the field of earth science is a magnetic ion probe with an electromagnet as a mass analyzer. The mass spectrum peak of the magnetic ion probe is a flat peak. The biggest advantage is that it can measure the ion intensity of each element with high precision. It is the first choice for high-precision isotope analysis at present. The new ion probe ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N1/32G01N27/62
CPCG01N1/32G01N27/62
Inventor 张建超林杨挺杨蔚
Owner INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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