Aligning device and manufacturing system for silicon-based OLED micro-displayer
A technology of micro-display and alignment device, which is applied in the manufacture of semiconductor/solid-state devices, electric solid-state devices, semiconductor devices, etc. It can solve the problems of inability to perform alignment and grasp alignment point patterns, etc., to simplify the industrialization process, The effect of high alignment accuracy and simple process
Inactive Publication Date: 2018-08-24
KUNSHAN FANTAVIEW ELECTRONICS TECH CO LTD
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Problems solved by technology
Because the silicon-based backplane is an opaque substrate, during the evaporation process, the alignment lens located on the top of the evaporation chamber cannot penetrate the silicon substrate to capture the alignment point pattern on the surface of the mask plate, so alignment cannot be performed
Method used
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[0026] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0027] see Figure 1 to Figure 3 As shown, the present invention discloses an alignment device for a silicon-based OLED microdisplay and a manufacturing system using the alignment device. The alignment device includes a silicon substrate 10, an alignment assembly and a mask plate 20 located below the silicon substrate 10, and the alignment assembly includes an alignment laser 31 located above the silicon substrate 10 and an alignment laser 31 located on the mask. The laser positioning member 32 below the diaphragm 20 , the alignment laser 31 is arranged opposite to the laser positioning member 32 , so that the laser positioning member 32 can receive the laser beam emitted by the alignment laser 31 .
[0028] The manufacturing system of the silico...
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The invention provides an aligning device for a silicon-based OLED micro-displayer. The aligning device comprises a silicon substrate, an aligning component and a mask plate which is positioned belowthe silicon substrate; the aligning component comprises aligning laser and a laser positioning part, wherein the aligning laser is positioned on the silicon substrate; the laser positioning part is positioned below the mask plate; the aligning laser and the laser positioning part are arranged oppositely; the silicon substrate is provided with a first hole which penetrates through the silicon substrate; the mask plate is correspondingly provided with a second hole so that the aligning laser can penetrate through the first hole and the second hole and realize laser alignment with the laser positioning part so as to realize high-precision alignment of the silicon substrate and the mask plate; moreover the alignment precision is high; the equipment and labor cost is low; the process is simple;and the industrial process can be simplified.
Description
technical field [0001] The invention relates to an alignment device of a silicon-based OLED microdisplay and a manufacturing system using the alignment device. Background technique [0002] Silicon-based OLED microdisplays have low power consumption, high contrast, and fast response, and can achieve high PPI (pixels perinch) and high refresh rate. They are widely used in high-end consumer VR / AR fields such as helmet displays, stereoscopic displays, and portable displays. The backplane of the silicon-based OLED microdisplay is monocrystalline silicon, which has many advantages such as high electron mobility and high yield rate of integrated circuit CMOS process. [0003] During the evaporation process of traditional glass-based OLED devices, the evaporation source is located at the bottom of the evaporation chamber, and the alignment lens located at the top of the evaporation chamber performs alignment by grabbing the alignment point pattern of the glass substrate and the mas...
Claims
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IPC IPC(8): C23C14/04C23C14/24C23C14/54H01L51/56
CPCC23C14/042C23C14/24C23C14/54H10K71/00
Inventor 吴疆
Owner KUNSHAN FANTAVIEW ELECTRONICS TECH CO LTD