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Slide for powder with poor electric conductivity for SEM (scanning electron microscopes) and method for applying slide

A technology of conductive performance and object slide, which is applied in the direction of material analysis, measurement device, instrument, etc. using wave/particle radiation, which can solve the problem that the conductive film cannot completely cover the powder particles, contaminate the optical path system of the electrode shoe of the electron microscope, and the powder cannot produce electrical conductivity. problems such as access, to achieve the effect of improving the economic performance of the experiment, reducing the time of gold spraying, and easy to spray gold.

Pending Publication Date: 2018-09-14
KUNMING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the spherical shape of the powder itself, the coating film cannot completely cover the powder particles, so that the powder cannot produce a conductive path, and the charging effect is prone to occur.
In addition, if the powder to be tested is not fixed firmly, the fine particles will be separated from the sample stage, polluting the pole shoe of the electron microscope and even the optical path system. Resin, and then mechanically polished, so that the particles are damaged to expose the interface section, and then coated with a conductive film, but this method will destroy the integrity of the particles, and will also increase the waste of time in the experimental steps

Method used

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  • Slide for powder with poor electric conductivity for SEM (scanning electron microscopes) and method for applying slide
  • Slide for powder with poor electric conductivity for SEM (scanning electron microscopes) and method for applying slide
  • Slide for powder with poor electric conductivity for SEM (scanning electron microscopes) and method for applying slide

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Firstly, the material of the slide 1 is selected as 45 steel, and then it is machined into 20mm×10mm×4mm. And use ion etching equipment to subtractively process it into an arc-shaped groove 1-1 that can accommodate particles, such as figure 1 As shown, the arc-shaped trench sizes L0, L1, and L2 are etched with widths of 300 μm, 10 μm, and 50 nm, such as figure 2 shown.

[0027] Next, clean the surface of the slide with anhydrous alcohol to remove impurities such as oil on the surface, dry it, and then stick the conductive adhesive 2 on the slide to ensure that the conductive glue covers the arc groove on the surface of the slide.

[0028] Further, sprinkle the dispersed WC ceramic powder particles 3 on the conductive adhesive, then use a blower to blow off the particles that are not firmly adhered, and then press them with a glass sheet 4 to ensure that the particles on the groove can be pressed into the groove by the glass sheet. Groove 1-1, wherein the conductive g...

Embodiment 2

[0031] Firstly, the material of the slide 1 is selected as TC4 alloy, and then it is machined into 20mm×10mm×4mm. And use ion etching equipment to subtractively process it into a square groove 1-1 that can accommodate particles, such as Figure 4 As shown, the dimensions L0, L1, and L2 of the square groove are etched with widths of 1000 μm, 50 μm, and 100 nm, such as Figure 5 shown.

[0032] Next, the surface of the slide is cleaned and dried, and then the conductive glue 2 is stuck on the slide to ensure that the conductive glue covers the square groove on the surface of the slide.

[0033] Further, sprinkle the dispersed Al on the conductive adhesive 2 o 3 Ceramic powder particles 3, then use a blower to blow off the particles that are not firmly adhered, and then press them with a glass sheet 4 to ensure that the particles on the groove can be pressed into the groove 1-1 by the glass sheet, wherein the conductive adhesive 2 is in the groove 1-1. Between the pressed par...

Embodiment 3

[0036] First, the material of the slide 1 is selected as brass H90 alloy, and then machined into a size of 20mm×10mm×4mm. And use additive equipment to process it into a metal mesh 1-2 and form a groove 1-1 that can accommodate particles, such as Figure 7 As shown, the metal mesh gap width D0 is 500μm, such as Figure 8 shown.

[0037] Next, the surface of the slide is cleaned and dried, and then the conductive glue 2 is stuck on the slide to ensure that the conductive glue covers the polygonal groove on the surface of the slide.

[0038] Further, sprinkle the dispersed Al on the conductive adhesive 2 o 3 Powder particles 3, then use a blower to blow off the particles that are not firmly adhered, and then press them with a glass sheet 4 to ensure that the particles on the groove can be pressed into the groove 1-1 by the glass sheet, in which the conductive adhesive 2 is being pressed The particle 3 is in the middle of the groove 1-1. Finally remove the glass sheet 4 to p...

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Abstract

The invention discloses a slide for powder with poor electric conductivity for SEM (scanning electron microscopes) and a method for applying the slide. The slide is made of conductive materials. A conductive metal net is arranged on the slide by means of subtractive processing or additional material attaching, and grooves are formed in the slide. Conductive adhesive is adhered on the slide when the slide is about to be used, and assuredly covers the grooves in the surface of the slide, powder particles are sprinkled on the conductive adhesive, particles which are not stably adhered are removed, and then the slide is compressed by glass sheets, so that the particles can be pushed into the grooves, the conductive adhesive is positioned between the compressed particles and the grooves, the glass sheets are ultimately removed, the unstable particles are removed again, and SEM vacuum tests can be carried out on samples after metal or carbon is sprayed.

Description

technical field [0001] The invention relates to an object slide for SEM powder with poor electrical conductivity and a use method thereof, belonging to the field of scanning electron microscope testing. Background technique [0002] Scanning electron microscope (SEM) is a large-scale analytical instrument, mainly used for microscopic analysis of the morphology of solid substances and micro-area analysis of conventional components. It has high resolution, large magnification, large depth of field, strong stereoscopic effect, and The advantages of simple preparation are widely used in the fields of chemical industry, materials, medicine, biology, minerals, justice and the like. Due to its high price and special working principle, it has high requirements for sample preparation, and the quality of sample preparation directly affects the success of sample analysis. When SEM tests non-conductive samples, the following situations will occur due to the influence of charging: 1) Th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/2202
CPCG01N23/2202
Inventor 刘洪喜郭新政陈清明刘子峰
Owner KUNMING UNIV OF SCI & TECH
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