mems micro-galvanometer and method for making the mems micro-galvanometer based on soi top layer silicon prefabrication
A manufacturing method and technology of micro-vibrating mirrors, which are applied in optical components, instruments, optics, etc., can solve the problems of large-scale mirror structure, high quality, and affecting the torsion angle and performance of the vibrating mirror, so as to enhance the electrical isolation effect and shorten the process. Machine time, the effect of simplifying the processing technology
Active Publication Date: 2020-06-05
XI AN ZHISENSOR TECH CO LTD
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[0006] In order to solve the problem that the quality of the large-scale mirror structure of the MEMS micro-vibration mirror processed by the conventional SOI wafer is too large, which affects the torsion angle and performance of the vibrating mirror, the present invention provides a MEMS micro-vibration mirror and a prefabricated specific micro-mirror based on SOI top layer silicon. The processing method of the MEMS vibrating mirror of the structure
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[0032] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0033] from figure 2 It can be seen that the MEMS vibrating mirror of the present invention includes the bottom silicon 4 and the top silicon 2 bonded to each other, the movable mirror 1, the beam 6, the comb teeth 7, the isolation trench 5 and other structures are located on the top silicon, and the movable mirror 1 Connected and fixed by the beam 6, and isolated by the isolation trench 5, it is independently suspended in the top layer of silicon 2, and a plurality of first chambers 8 are opened on the back of the movable mirror 1 to reduce the quality of the mirror structure. There is a second chamber 9 that provides the space required for the movable mirror to twist. The plurality of first chambers 8 are distributed axisymmetrically with respect to the torsion axis of the movable mirror, and are arranged centrally symmetrically with respec...
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Abstract
The invention provides a MEMS micro vibrating mirror and a manufacturing method for prefabricating an MEMS micro vibrating mirror based on SOI top silicon. Before bonding to form an SOI wafer, a specific microstructure is prepared by micromachining on the back side of the top silicon to remove the partial mass of the mirror surface and maintain the structural strength and size of the mirror, meanwhile, a chamber is prepared in advance on the front side of the bottom silicon according to the size of the space required for the torsional motion of the mirror, then the micro-structured sides of the top silicon and the bottom silicon are aligned and bonded to form the SOI wafer and then thin the SOI wafer to the target thickness by the grinding and polishing process, and finally, a metal reflective layer and a mirror movable structure required are processed and manufactured on the front surface of the top silicon, so that the problem of torsional angle and performance of the vibrating mirror due to overlarge mass of the large-sized mirror surface structure of the MEMS micro vibrating mirror processed by the conventional SOI wafer is solved, thereby expanding the degree of freedom of MEMS micro vibrating mirror design and processing, and improving the performance of the MEMS micro vibrating mirror, and being of great significance especially for the fabrication of the MEMS micro vibrating mirror with high reliability and large mirror size.
Description
technical field [0001] The invention relates to the technical field of micro-electromechanical systems, in particular to a MEMS micro-vibration mirror and a method for manufacturing the MEMS micro-vibration mirror with a specific microstructure prefabricated on the silicon on the top layer of an SOI wafer. Background technique [0002] The MEMS micro-vibration mirror is a micro-mechanical structure with a movable suspension structure. The electromechanical properties of the micro-structure of each part of the micro-vibration mirror determine the performance of the micro-vibration mirror. The use of conventional SOI (Silicon-On-Insulator) wafers as the raw material for the structure design and process design of the micro-vibration mirror has obvious effects on simplifying the processing technology and improving the processing yield, but there are still deficiencies. During the bulk silicon process of the micro-vibration mirror using conventional SOI wafers as raw materials, s...
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IPC IPC(8): G02B26/08
CPCG02B26/0833
Inventor 游桥明乔大勇夏长锋宋秀敏
Owner XI AN ZHISENSOR TECH CO LTD