Method for controlling orientation of neodymium barium copper oxygen films
A neodymium barium copper oxide and thin film orientation technology, which is applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of unable to control the growth orientation of the film, the reduction of migration energy, and the attenuation of superconductivity. The effect of continuous and uniform film structure, excellent superconducting properties, and consistent out-of-plane orientation of grains
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Embodiment 1
[0036] A method for regulating the orientation of a neodymium-barium-copper-oxygen thin film, comprising the following steps:
[0037] 1) Using a laser chemical vapor deposition device, put the substrate into the reactor on the graphite substrate seat above the heating body, pump the pressure below 30Pa, and raise the temperature of the heating body to 1000°C;
[0038] 2) Pass argon and oxygen containing organic neodymium source, barium source, copper source into the reactor, adjust the flow rate of organic neodymium source and copper source to be 100 sccm respectively, the flow rate of organic barium source to be 150 sccm, and the oxygen flow rate to be 500 sccm, adjust The pressure of the reactor is up to 600Pa;
[0039] 3) Using a continuous laser generator, load a continuous laser with a wavelength of 808nm to irradiate the substrate surface, move the lens position to adjust the laser spot size to suit the substrate size, and set the laser power to 77W so that the depositi...
Embodiment 2
[0045] A method for regulating the orientation of a neodymium-barium-copper-oxygen thin film, comprising the following steps:
[0046] 1) Using a laser chemical vapor deposition device, put the substrate into the reactor on the graphite substrate seat above the heating body, pump the pressure below 30Pa, and raise the temperature of the heating body to 1000°C;
[0047] 2) Pass argon and oxygen containing organic neodymium source, barium source, copper source into the reactor, adjust the flow rate of organic neodymium source and copper source to be 100 sccm respectively, the flow rate of organic barium source to be 150 sccm, and the oxygen flow rate to be 500 sccm, adjust The pressure of the reactor is up to 600Pa;
[0048] 3) Using a continuous laser generator, load a continuous laser with a wavelength of 808nm to irradiate the substrate surface, move the lens position to adjust the laser spot size to suit the substrate size, and set the laser power to 89W, so that the deposit...
Embodiment 3
[0055] A method for regulating the orientation of a neodymium-barium-copper-oxygen thin film, comprising the following steps:
[0056] 1) Using a laser chemical vapor deposition device, put the substrate into the reactor on the graphite substrate seat above the heating body, pump the pressure below 30Pa, and raise the temperature of the heating body to 1000°C;
[0057] 2) Pass argon and oxygen containing organic neodymium source, barium source, copper source into the reactor, adjust the flow rate of organic neodymium source and copper source to be 100 sccm respectively, the flow rate of organic barium source to be 150 sccm, and the oxygen flow rate to be 500 sccm, adjust The pressure of the reactor is up to 600Pa;
[0058] 3) Using a continuous laser generator, load a continuous laser with a wavelength of 808nm to irradiate the surface of the substrate, move the lens position to adjust the laser spot size to suit the substrate size, and set the laser power to 105W to make the ...
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