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Method for controlling orientation of neodymium barium copper oxygen films

A neodymium barium copper oxide and thin film orientation technology, which is applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of unable to control the growth orientation of the film, the reduction of migration energy, and the attenuation of superconductivity. The effect of continuous and uniform film structure, excellent superconducting properties, and consistent out-of-plane orientation of grains

Active Publication Date: 2018-10-16
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, MOCVD technology generally adopts the ordinary Joule heat transfer method, which will cause the gradient of the deposition temperature to weaken in the thickness direction. As the thickness of the film increases, the migration energy obtained by the atoms on the deposition surface decreases, and the change of the growth orientation of the film cannot be controlled, resulting in the appearance of the structure. deterioration, resulting in a significant decline in superconducting properties

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  • Method for controlling orientation of neodymium barium copper oxygen films
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  • Method for controlling orientation of neodymium barium copper oxygen films

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Embodiment 1

[0036] A method for regulating the orientation of a neodymium-barium-copper-oxygen thin film, comprising the following steps:

[0037] 1) Using a laser chemical vapor deposition device, put the substrate into the reactor on the graphite substrate seat above the heating body, pump the pressure below 30Pa, and raise the temperature of the heating body to 1000°C;

[0038] 2) Pass argon and oxygen containing organic neodymium source, barium source, copper source into the reactor, adjust the flow rate of organic neodymium source and copper source to be 100 sccm respectively, the flow rate of organic barium source to be 150 sccm, and the oxygen flow rate to be 500 sccm, adjust The pressure of the reactor is up to 600Pa;

[0039] 3) Using a continuous laser generator, load a continuous laser with a wavelength of 808nm to irradiate the substrate surface, move the lens position to adjust the laser spot size to suit the substrate size, and set the laser power to 77W so that the depositi...

Embodiment 2

[0045] A method for regulating the orientation of a neodymium-barium-copper-oxygen thin film, comprising the following steps:

[0046] 1) Using a laser chemical vapor deposition device, put the substrate into the reactor on the graphite substrate seat above the heating body, pump the pressure below 30Pa, and raise the temperature of the heating body to 1000°C;

[0047] 2) Pass argon and oxygen containing organic neodymium source, barium source, copper source into the reactor, adjust the flow rate of organic neodymium source and copper source to be 100 sccm respectively, the flow rate of organic barium source to be 150 sccm, and the oxygen flow rate to be 500 sccm, adjust The pressure of the reactor is up to 600Pa;

[0048] 3) Using a continuous laser generator, load a continuous laser with a wavelength of 808nm to irradiate the substrate surface, move the lens position to adjust the laser spot size to suit the substrate size, and set the laser power to 89W, so that the deposit...

Embodiment 3

[0055] A method for regulating the orientation of a neodymium-barium-copper-oxygen thin film, comprising the following steps:

[0056] 1) Using a laser chemical vapor deposition device, put the substrate into the reactor on the graphite substrate seat above the heating body, pump the pressure below 30Pa, and raise the temperature of the heating body to 1000°C;

[0057] 2) Pass argon and oxygen containing organic neodymium source, barium source, copper source into the reactor, adjust the flow rate of organic neodymium source and copper source to be 100 sccm respectively, the flow rate of organic barium source to be 150 sccm, and the oxygen flow rate to be 500 sccm, adjust The pressure of the reactor is up to 600Pa;

[0058] 3) Using a continuous laser generator, load a continuous laser with a wavelength of 808nm to irradiate the surface of the substrate, move the lens position to adjust the laser spot size to suit the substrate size, and set the laser power to 105W to make the ...

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Abstract

The invention discloses a method for controlling orientation of neodymium barium copper oxygen films. Based on a traditional metal organic matter chemical vapor deposition technology, continuous laserwith high energy density is further introduced, so that the chemical reaction activation barrier can be reduced, the reaction speed is accelerated, meanwhile, uniform and stable distribution of a radiation field in a deposition area is guaranteed, and prepared film structures are continuous, uniform and ordered in in-plane arrangement; and through simple control of the laser power and the loadingtime, the controllability and the adjustability of orientation structures of the neodymium barium copper oxygen films can be realized, and in particular, the neodymium barium copper oxygen films withmixed structures oriented on a and c axles in the thickness directions can be prepared, so that a brand new thought is provided for preparation of composite films with two orientation structures, andimportant research and popularization meaning is achieved.

Description

technical field [0001] The invention belongs to the field of film material preparation, and in particular relates to a method for regulating the orientation of a neodymium barium copper oxide film. Background technique [0002] In recent years, neodymium barium copper oxide thin film (NdBa 2 Cu 3 o 7-δ , referred to as NBCO) has become the focus of superconducting material research and development due to its highest superconducting transition temperature among yttrium-based superconducting materials and excellent high-field superconducting performance at 77K. Due to the large difference in the coherence length (ξ) along the ab plane and along the c axis in NBCO crystals, NBCO crystals have extremely strong anisotropy, which leads to the application of crystals with different orientations in different fields. For example, the a-axis oriented NBCO crystal has very superior properties in the preparation of S-I-S or S-N-S Josephson junctions and tunable filters by virtue of i...

Claims

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Application Information

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IPC IPC(8): C23C16/40C23C16/48
CPCC23C16/40C23C16/483
Inventor 涂溶王凯东章嵩张联盟
Owner WUHAN UNIV OF TECH