GaN-based light emitting diode chip and preparation method thereof
A light-emitting diode and chip technology, which is applied in the field of optoelectronics, can solve the problems of low light extraction efficiency and the inability to obtain light from the bottom of the electrode, etc., and achieve the effect of increasing light output efficiency and simple process
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Embodiment 1
[0049] A GaN-based light-emitting diode chip, which sequentially includes a sapphire substrate 1, an N-GaN layer 2, a quantum well layer 3, a P-GaN layer 4, a current spreading layer 6, a passivation layer 9, and a P electrode from bottom to top 7. The P electrode 7 is formed on the current spreading layer 6 , and the metal reflective layer 5 is arranged between the current spreading layer 6 and the P electrode 7 . Such as figure 1 shown.
[0050] The metal reflective layer 5 is arranged under the current spreading layer 6, the length of the cross section of the metal reflective layer 5 is smaller than the length of the cross section of the P electrode 7, the metal reflective layer 5 is an Al film, and the thickness of the Al film is 0.135 μm.
[0051] For the same GaN epitaxial wafer, there is no metal reflective layer, the metal reflective layer is located between the electrode and the current spreading layer, and the metal reflective layer described in this embodiment is l...
Embodiment 2
[0056] The preparation method of the GaN-based light-emitting diode chip described in embodiment 1 includes the following steps:
[0057] (1) growing N-GaN layer 2, quantum well layer 3, and P-GaN layer 4 sequentially on sapphire substrate 1;
[0058] (2) A layer of 0.135 μm Al film is deposited on the P-GaN layer 4; a positive photoresist with a thickness of 1.8 μm is coated on the surface of the Al film; the positive photoresist is removed by conventional photolithography and chemical corrosion , to produce a metal reflective layer 5 . The cross-sectional view of the GaN-based light-emitting diode chip prepared in step (2) is as follows figure 2 shown.
[0059] (3) Deposit a layer of ITO film with a thickness of 0.12 μm on the surface of the GaN-based LED chip prepared in step (2); coat a positive photoresist with a thickness of 3.5 μm on the surface of the ITO film; obtain the P region by photolithography Mesa: Etch the N-region ITO film, perform conventional ICP etchin...
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