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A high-density photonic integrated waveguide grating array

A technology of waveguide grating and waveguide, which is applied in the field of optoelectronic integrated devices and preparation, can solve the problem of low crosstalk between waveguides, and achieve the effect of high scanning range and precision

Active Publication Date: 2021-07-13
江伟
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For high-density waveguide arrays with waveguide spacing close to or smaller than the wavelength, it is difficult to obtain low crosstalk between all waveguides by changing the propagation constant of the waveguides at will.

Method used

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  • A high-density photonic integrated waveguide grating array
  • A high-density photonic integrated waveguide grating array
  • A high-density photonic integrated waveguide grating array

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] High-density optical phased array antenna arrays are implemented on silicon-on-insulator (SOI), such as figure 1 shown. The structure can be divided into four layers: a silicon substrate 1 , a silicon oxide layer 2 , a silicon layer 3 defining the device, and a top-covering silicon dioxide layer 4 , on which the bulk of the device rests. The phased array antenna array is composed of four repeated array units 10, and each array unit includes five different waveguide gratings 5-9. These five different waveguide gratings have different waveguide widths, so that the waveguide modes have different Spread constant. In this example light propagates in the waveguide along the x-axis direction (-x direction to be exact). where the grating structure is obtained by etching13,14. Each grating has a different period to ensure that the optical signal exits at the same angle. The specific relationship can be obtained by the following formula:

[0037]

[0038] where β is the p...

Embodiment 2

[0040] The number of array units is not limited to four, and can be increased or decreased according to requirements, for example, 3-1000. The number of waveguide gratings in each array unit is not limited to five, for example, 2-20.

Embodiment 3

[0042] The waveguide structure can use not only the strip waveguide 11, but also the ridge waveguide 12, or other waveguide forms.

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Abstract

A waveguide grating array for high-density photonic integration. A device for transmitting multiple optical signals, including 3 or more waveguide gratings arranged in parallel; the propagation constant of each of the waveguide gratings is different from that of the adjacent waveguide gratings; the period of each grating is related to the propagation of the waveguide where it is located Constant correlation, the optical signal can exit at the same angle after passing through different waveguide gratings. Since the interval between waveguide gratings is very small, the array is suitable for optical phased array antennas, and large-angle lateral scanning can be realized by changing the relative phase difference between all waveguide gratings, which is widely used in the fields of laser radar, medical imaging, wireless communication, etc. It has a very broad application prospect.

Description

technical field [0001] The invention relates to an optoelectronic integrated device and its preparation, especially a high-density photon integrated waveguide grating array. Background technique [0002] Silicon-based photonic devices have great application prospects in large-scale optoelectronic integration due to the advantage of low cost, and it is also an important means to realize optical phased arrays. Optical phased array has the characteristics of low cost, high speed, and high precision. It has important applications in lidar, medical imaging, wireless communication, etc. In order to further improve the scanning accuracy and scanning angle of the optical phased array, how to increase the density of the phased array antenna is an important problem to be solved. [0003] In the era of big data and artificial intelligence, autonomous driving technology has received extensive attention to solve the problem of traffic accidents caused by insufficient driving skills and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/12G02B6/124G02B6/125
CPCG02B6/12009G02B6/124G02B6/125
Inventor 江伟邵越冷乐蒙
Owner 江伟
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