Array substrate
A technology of array substrates and pixel arrays, which can be applied in the fields of instruments, nonlinear optics, optics, etc., and can solve problems such as adverse effects of component electrical properties
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[0043] The present disclosure relates to an array substrate. In some embodiments, a first passivation layer is on a planarization layer, and the planarization layer is on a metal layer. The first protective layer has an opening, the opening is located in the display area of the array substrate, and the opening penetrates the first protective layer and extends to the flat layer. Next, a conductive layer is formed on the first protection layer and fills up the opening to cover the planar layer exposed from the opening. In this way, before forming the conductive layer, an appropriate amount of water vapor can diffuse into the flat layer through the opening; and after the conductive layer is formed, excess water gas can be blocked by the conductive layer to prevent further diffusion into the flat layer. The applicant found that the electric properties of the semiconductor elements in the array substrate can be improved by controlling an appropriate amount of water vapor to ente...
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