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High-precision real-time amplitude measurement device and method based on self-mixing interference

A technology of self-mixing interference and amplitude measurement, which is applied to measuring devices, measuring ultrasonic/sonic/infrasonic waves, instruments, etc., can solve the problems of the difficulty of fringe counting method, unsuitable application occasions, and high measurement accuracy, so as to achieve a large degree of freedom of choice , The measurement method is simple and reliable, and the effect of high measurement accuracy

Inactive Publication Date: 2018-11-30
XIAMEN UNIV
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Problems solved by technology

Multiple reflection method 【IEEE Photonics Journal, 5(3), 2013】Although the measurement accuracy increases with the increase of the number of reflections, when the amplitude is large, the pursuit of high precision and the number of fringes also increase accordingly. The sharp increase has brought difficulty to the traditional streak counting method
Therefore, these applications are not suitable for simple measurements and real-time nanometer-level high-precision resolution applications.

Method used

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  • High-precision real-time amplitude measurement device and method based on self-mixing interference
  • High-precision real-time amplitude measurement device and method based on self-mixing interference
  • High-precision real-time amplitude measurement device and method based on self-mixing interference

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Embodiment 1

[0032] see figure 2 , the present invention discloses an amplitude measurement device based on self-mixing interference, including a laser light source 1, a beam splitter 2, a photodetector 3, a mirror 4, a signal processing unit 5, a data processing display unit 6 and a measured object 7 ,in:

[0033] The laser light source 1 adopts a semiconductor-pumped all-solid-state green laser. Of course, the laser light source 1 can also use other lasers with satisfactory collimation, which is not specifically limited in the present invention.

[0034] refer to figure 2 As shown, the beam splitter 2 is used to divide the emitted laser light into two paths, one path hits the measured object 7, and the other path hits the photodetector 3 to detect fluctuations in laser power;

[0035] The reflector 4 is used to form a multi-optical path structure with the measured object to meet different measurement requirements, and at the same time ensure that the laser light returns to the laser...

Embodiment 2

[0042] Cooperate figure 2 and image 3 As shown, the present invention discloses a high-precision amplitude measurement method based on self-mixing interference. The method adopts the high-precision amplitude measurement device based on self-mixing interference in Embodiment 1, and is specifically implemented through the following steps:

[0043] S1. Prepare the object to be measured and ensure that the object to be measured has a certain reflectivity;

[0044] S2. Adjust the positional relationship between the measured object and the reflector to ensure that the measured object and the reflector form a multi-optical path structure;

[0045] S3. Turn on the laser light source, adjust the reflector to change the multi-optical path structure to meet different amplitude measurement requirements, and ensure that the laser can return to the laser light source;

[0046] S4. The photodetector detects the change of laser power to obtain a corresponding signal, and the signal proces...

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Abstract

The invention discloses a high-precision real-time amplitude measurement device based on self-mixing interference. The device comprises a laser light source, a beam splitter, a photoelectric detector,a reflector, a signal processing unit, a data processing display unit and a measurement subject, wherein the laser light source, the beam splitter, the photoelectric detector, the measurement subjectand the reflector are sequentially connected via an optical path; and the input end of the signal processing unit is connected with the photoelectric detector, and the output end of the same is connected with the data processing unit. The invention also discloses a high-precision real-time amplitude measurement method based on self-mixing interference. According to the device and method providedby the invention, a reference arm of a traditional laser interferometer is not needed, a single-arm optical path is easy to collimate, and the noise sensitivity of the system to the outside is reduced. A self-mixing interference principle is used, so that no specific requirement on coherence of the laser light source is needed, and the freedom of choice of the laser is large. Meanwhile, a gain parameter of the device is controllable, and a measurable minimum amplitude value can reach nanoscale; a signal spectrum feature value is acquired in a frequency domain, stripes do not need to be counted, and real-time wide-range measurement is easy to implement.

Description

technical field [0001] The invention belongs to the technical field of optical nanometer measurement, in particular to a high-precision amplitude real-time measurement device and method based on self-mixing interference. Background technique [0002] Nano-vibration measurement is becoming more and more important in many applications such as high-precision engineering technology, precision machining, and aerospace. At present, researchers have proposed some meaningful methods for measuring the amplitude of weakly vibrating objects. Among them, the measurement method based on optical technology has the advantages of non-contact and high precision, and has attracted much attention. Commonly used optical vibration measurement methods include geometric optics and optical interferometry. However, most of the reported optical measurement methods require a complex and precise optical adjustment system. At the same time, the measurement range is limited by the influence of the lase...

Claims

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Application Information

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IPC IPC(8): G01H9/00
CPCG01H9/00
Inventor 黄文财魏铮张燕亭冯腾熊彦彬
Owner XIAMEN UNIV
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