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PECVD device for lithium battery aluminum foil electrode deposited graphene film capable of discharging hydrogen

A graphene film, aluminum foil electrode technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problem of reducing hydrogen concentration, affecting the quality of graphene deposition, etc., to achieve the effect of reducing hydrogen concentration

Inactive Publication Date: 2018-12-14
李涛
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The invention divides the vacuum deposited PECVD chamber (1) into a deposition chamber (2), a gas separation chamber (3), and a hydrogen storage chamber (4), and makes the internal gas flow circulate, and only hydrogen can pass through in the circulation. The hydrogen filter membrane filters out hydrogen and discharges it to the exhaust chamber outside the PECVD chamber, reducing the concentration of hydrogen at the deposition surface. It is a new PECVD device that separates and discharges hydrogen, and solves the problem of high hydrogen content affecting graphene deposition on the surface of aluminum foil. quality problem

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  • PECVD device for lithium battery aluminum foil electrode deposited graphene film capable of discharging hydrogen

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Embodiment Construction

[0012] 1. Open the door of the PECVD chamber (1) and install the aluminum foil on the unwinding shaft (42) and the unwinding shaft (43). The chamber (1) door is sealed well, the gas cylinder (30) is connected to the methane gas cylinder, the valve (29) on the gas inlet pipe (27) and the valve (33) on the cylinder gas outlet pipe (31) are closed, and the other valves are opened. valve. Start all the vacuum pumps to evacuate the PECVD chamber (1), when all the pressure gauges show 10 -5 Pa, close valve (19), valve (14), valve (16), valve (36), valve (40), valve (10) and valve (25).

[0013] 2. Open the valve (33) on the bottle outlet pipe (31) to input methane into the PECVD cavity (1), observe the amount and speed of the input methane through the vector flowmeter (32), and observe the pressure gauge (20) of the deposition chamber (2) ) and the pressure of the hydrogen separation chamber (3) pressure gauge (21) all reach 10 -2 Pa, close the valve (33). Start the electrode (4...

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Abstract

A PECVD device for a lithium battery aluminum foil electrode deposited graphene film capable of discharging hydrogen is provided. The PECVD cavity for vacuum deposition is divided into a deposition chamber, a gas separation chamber, and a hydrogen storage chamber. Internal gas is circulated during deposition, hydrogen is filtered out by a hydrogen filter membrane that allows only the hydrogen to pass during circulation, and the hydrogen is discharged out of the PECVD cavity. A graphene film is formed on the surface of an aluminum foil electrode by using plasma enhanced chemical meteorologicaldeposition carbon to reduce the influence of high hydrogen content on the formation of a graphene structure and the uneven deposition of graphene. The PECVD device belongs to the technical field of battery material equipment.

Description

technical field [0001] The invention relates to a vacuum device for depositing graphene films on electrodes of lithium batteries, which uses plasma-enhanced chemical vapor deposition carbon to form graphene films on the surface of aluminum foil electrodes to separate and discharge the generated hydrogen from the plasma cavity to reduce graphite The invention relates to plasma vapor chemical deposition (PEVCD) equipment with too high hydrogen content in olefin, belonging to the technical field of battery material equipment. Background technique [0002] The existing equipment used to deposit carbon on the surface of aluminum foil electrodes of lithium batteries to generate graphene films is a plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition, referred to as PEVCD) device, and the deposition part of the device is a closed vacuum chamber. PEVCD ionizes the methane gas input into the cavity to form a carbon and hydrogen plasma, and deposits the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/26C23C16/50C23C16/54
CPCC23C16/26C23C16/4412C23C16/50C23C16/545
Inventor 李涛杨海燕袁志刚李文莉李雨澄
Owner 李涛