Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Metal V-shaped grating Fano resonance structure with adjustable tip spacing

A resonant structure and adjustable technology, applied in optics, optical components, and material analysis through optical means, can solve problems such as difficulty in ensuring target molecules, decreased sensitivity, limited range, etc., to achieve precise transfer and inversion, surface integrity, less susceptible to contamination

Active Publication Date: 2018-12-14
SOUTHEAST UNIV
View PDF16 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the same time, because the field enhancement of the structure pair is a point enhancement, the range is limited, it is difficult to ensure that the target molecule exists within the field enhancement range, and there is a phenomenon of decreased sensitivity or even missing signals.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Metal V-shaped grating Fano resonance structure with adjustable tip spacing
  • Metal V-shaped grating Fano resonance structure with adjustable tip spacing
  • Metal V-shaped grating Fano resonance structure with adjustable tip spacing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] The present invention will be further described below in conjunction with the accompanying drawings.

[0019] Such as figure 1 , the metal plasmon Fano resonance structure with adjustable tip spacing of the present invention is sequentially formed on the metal film on the substrate, the optically transparent elastic medium substrate, the metal film is a gold film or silver film, and the optically transparent medium film The material is Nolan glue or epoxy resin. Preferably, the height of the metal film is 220 nm, the thickness is 80 nm, and the period of the grating is 745 nm, so that the grating excites the surface plasmon resonance wave at a wavelength of 800 nm. In addition, the slit pitch of the unit structure is 10 nm.

[0020] Correspondingly, as Figure 4 , the method for preparing the metal plasmon resonance structure includes the following steps:

[0021] (S1) A 35-nm-thick layer of SiO was deposited using chemical vapor deposition (PECVD) on the top silic...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a metal V-shaped grating Fano resonance structure with an adjustable tip spacing. The resonance structure comprises a layer of transparent elastic substrate and a metal V-shaped grating. The nanoscale spacing of structure tips is realized by bending the elastic substrate, so that local field enhancement factors near the tips are greatly enhanced. The adjustable characteristic of the tip spacing ensures the reliability of the tip spacing in a preparation process, so that high sensitivity and high accuracy of detection are effectively guaranteed. A main local area of a resonance light field of the structure is located at the tips of slits, and a field enhancement range is also extended to a line from a point of a traditional nano-particle pair. A preparation method of the resonance structure is based on anisotropic etching of silicon and a stripping technology of a metal film; the process is simple and convenient; the reliability is high; the repeatability is good; and the application is convenient.

Description

technical field [0001] The invention relates to a metal plasmon resonance structure and a preparation method thereof, in particular to a metal V-shaped grating Fano resonance structure with adjustable tip spacing. Background technique [0002] Because Raman scattering has fingerprint characteristics, the Raman scattering technology without marking can be directly applied to high-precision sensors. However, if the spontaneous Raman scattering is directly applied to the sensor, there are problems such as small detection range, high laser power required, and insufficient sensitivity, which greatly limit its application range. The surface plasmon resonance structure developed in recent years can achieve local field enhancement of several orders of magnitude. Surface plasmon resonance refers to the collective oscillation of electrons excited by light irradiation on nano-metal structures. Such electronic oscillations are different from electronic oscillations excited by metal pla...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01N21/65G01N21/01G02B5/00
CPCG01N21/01G01N21/658G02B5/008
Inventor 吕昌贵祁正青史士鹏钟嫄崔一平
Owner SOUTHEAST UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com