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Novel quartz crucible preparation process

A quartz crucible and preparation technology, which is applied in the field of new quartz crucible preparation technology, can solve the problems of reduced crystal formation rate, increased crystal pulling abnormal rate, coating peeling, etc., and achieve the effects of increased service life, stable quality, and reduced reaction

Active Publication Date: 2019-01-01
INNER MONGOLIA OJING QUARTZ CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, in order to prevent the expansion and rupture of the bubbles in the bubble composite layer of the quartz crucible during the crystal pulling process, resulting in a decrease in the deformation resistance of the quartz crucible and a decrease in thermal radiation efficiency, and an increase in the abnormal rate of the final crystal pull and a decrease in the crystal formation rate, it is usually used in the quartz crucible. Coatings are provided on the inner and outer walls of the crucible to prevent bubbles from bursting and escaping from reacting with the inner surface of the quartz crucible, and to improve the resistance to deformation and heat radiation efficiency of the quartz crucible; however, the coating is easily exposed to external forces during transportation and silicon loading. Peeling, the use effect is not good, and it is easy to affect the quality of crystal pulling

Method used

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  • Novel quartz crucible preparation process

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Effect test

Embodiment 1

[0022] Such as figure 1 Shown, novel quartz crucible preparation process, the size of the novel quartz crucible of preparation is 20 inches, and it specifically comprises the following steps:

[0023] (1) Raw material preparation: Weigh 20.5kg of quartz sand that has passed the quality inspection and meets the production requirements, the total impurity content of natural quartz sand is ≤20ppm, and the proportion of quartz sand with a particle size of ≤150μm per unit weight is 15%;

[0024] (2) Debugging before prefabrication: (1) After the preparation of raw materials is completed, install the crucible mold and its jacket on the rotating shaft, tilt the crucible mold to the position where the angle between its axis and the horizontal plane is 60°, and then start the rotation Shaft, so that the rotating speed of the crucible mold is 82r / min;

[0025] (3) Prefabrication: (2) After the prefabrication debugging is completed, place the quartz sand in the crucible mold, and use a ...

Embodiment 2

[0034] Such as figure 1Shown, novel quartz crucible preparation process, the size of the novel quartz crucible of preparation is 22 inches, and it comprises the following steps:

[0035] (1) Raw material preparation: Weigh 29.5kg of quartz sand that has passed the quality inspection and meets the production requirements. The total impurity content of natural quartz sand is ≤20ppm, and the proportion of quartz sand with a particle size of ≤150μm per unit weight is 15%;

[0036] (2) Debugging before prefabrication: (1) After the preparation of raw materials is completed, install the crucible mold and its jacket on the rotating shaft, tilt the crucible mold to the position where the angle between its axis and the horizontal plane is 72°, and then start the rotation Shaft, so that the rotating speed of the crucible mold is 80r / min;

[0037] (3) Prefabrication: (2) After prefabrication debugging is completed, place the quartz sand in the crucible mold, and use a forming rod that m...

Embodiment 3

[0046] Such as figure 1 Shown, novel quartz crucible preparation process, the size of the novel quartz crucible of preparation is 24 inches, and it comprises the steps:

[0047] (1) Raw material preparation: Weigh 37.5kg of quartz sand that has passed the quality inspection and meets the production requirements, the total impurity content of natural quartz sand is ≤20ppm, and the proportion of quartz sand with a particle size of ≤150μm per unit weight is 15%;

[0048] (2) Debugging before prefabrication: (1) After the preparation of raw materials is completed, install the crucible mold and its jacket on the rotating shaft, tilt the crucible mold to the position where the angle between its axis and the horizontal plane is 84°, and then start the rotation Shaft, so that the rotating speed of the crucible mold is 76r / min;

[0049] (3) Prefabrication: (2) After the prefabrication debugging is completed, place the quartz sand in the crucible mold, and use a forming rod that meets ...

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Abstract

The invention discloses a novel quartz crucible preparation process, which comprises: (1) raw material preparing; (2) debugging before prefabricating; (3) prefabricating; (4) debugging before melting;and (5) melting. According to the present invention, by controlling the opening / closing of the vacuum valve and the melting condition during the melting, the bubble composite layer with the high micro-bubble content is sandwiched between the transparent layer with the low micro-bubble content and the thin bubble outer layer, such that the uniform radiation on the quartz crucible by the heat source during the crystal pulling operation can be ensured, the bubbles in the bubble composite layer cannot expand and break during the crystal pulling, the reaction between the quartz crucible outer surface bubbles after expansion breaking caused by the long-term crystal pulling and the quartz crucible can be reduced, the crystallization layer forming time after the reaction can be delayed, and the service life of the quartz crucible can be prolonged, wherein the service life of the quartz crucible can be increased to 190 h, and is increased by more than 90 h compared to the conventional quartz crucible so as to meet the crystal pulling process requirements of at least 3-4 single crystal rods.

Description

Technical field: [0001] The invention relates to a preparation process of a quartz crucible, in particular to a novel preparation process of a quartz crucible. Background technique: [0002] Quartz crucible is an essential basic equipment in the process of pulling single crystal silicon. The conventional arc quartz crucible for pulling single crystal is composed of inner layer and outer layer. The proportion of air bubbles is about 1 / 3, and the bubble content is low; the outer layer is a bubble composite layer, whose thickness accounts for about 2 / 3 of the crucible wall thickness, and the air bubble content is high, which is the deformation strength of the supporting crucible, guarantee The part where the heat source radiates evenly. [0003] The melting and drawing of single crystal silicon is carried out in the graphite thermal field, and the temperature of the graphite thermal field is as high as 1600°C. During the long-term and high-temperature use, the bubbles in the o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/10C30B29/06
CPCC30B15/10C30B29/06
Inventor 杜兴林祝立君于宏宇章北铭刘应龙
Owner INNER MONGOLIA OJING QUARTZ CO LTD
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