Integrated diffraction grating type high stability laser displacement sensor

Abstract

The invention discloses an integrated diffraction grating type high stability laser displacement sensor. The sensor includes a sensor body, wherein the sensor body includes a collimation module of a laser diode, a diffraction grating, a diaphragm, a filter, an imaging lens and a CMOS linear image sensor, the laser diode collimation module of the laser displacement sensor emits a collimation beam,the beam is diffusely reflected by a surface of a detected object, passes through the diaphragm and the imaging lens and is then split into multiple diffraction spots by the special transmission typediffraction grating, displacement of the detected object is reversed through utilizing each diffraction spot, solved multiple displacement data are subjected to averaging or median value processing, and the actual displacement of the detected object can be obtained. Compared with a conventional laser triangle range finding sensor, the displacement of the detected object is solved through utilizingthe information of the multiple diffraction spots in the case of measuring the displacement once, influence of environmental factors such as noise is reduced, and the stability of the measured data is effectively improved.

Description

technical field [0001] The invention relates to a displacement measuring instrument, in particular to an integrated diffraction grating type high-stability laser displacement sensor. Background technique [0002] The laser triangulation method is a kind of photoelectric detection method, which has the advantages of simple structure, high measurement accuracy, strong real-time processing ability, flexibility and convenience, and is not affected by the surface of the measured object. It is widely used in shape detection. [0003] The laser triangulation rangefinder is generally composed of a laser diode, a laser beam collimating lens, an imaging lens and an image detector. The image is always clearly focused on the image sensor. When the position of the object changes, correspondingly, the position of the image formed on the image sensor also changes to a certain extent at the same time, and the displacement of the real object is calculated through the relationship between t...

AI Technical Summary

Problems solved by technology

[0004] In recent years, with the continuous development of science and technology, there are higher requirements for the accuracy and range of measurement in the industrial field, especially in the field of micro-nano detection, the device scale is extremely small, and the requirements for dimensional accuracy are more stringent. The signal stability requirements of the triangulation ranging system are getting higher and higher, while the traditional laser triangulation ranging system can only be improved from the aspects of hardware and software

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