Chip-level spectrum detection device based on standard CMOS process

Abstract

The invention provides a chip-level spectrum detection device based on a standard CMOS process. The chip-level spectrum detection device comprises a spectrum detection chip body integrated by virtue of a standard CMOS integrated circuit process. The chip-level spectrum detection device has the advantages of small volume, lightness, low cost and the like; the device can be completely compatible with a large-scale integrated circuit, so that the subsequent sampling, processing and transmission of signals are facilitated. The spectrum detection chip body comprises an incident light collimation and diffraction module and a light intensity induction module, wherein the light intensity induction module is arranged at the bottom of the incident light collimation and diffraction module and is usedfor receiving incident light diffracted by virtue of the incident light collimation and diffraction module; the incident light collimation and diffraction module comprises m optical micro-cavities which are arrayed in parallel, and double-layer slits are formed in the top of the optical micro-cavities; and the wavelength information of the incident light is differentiated by virtue of different field intensity distribution information, so that a spectrum analysis function is realized.

Description

technical field [0001] The invention relates to the field of light sensing devices, and mainly relates to a chip-level spectral detection device based on a standard CMOS process. Background technique [0002] The spectroscopic analysis method is fast, easy to operate, high sensitivity, good selectivity, and does not need to destroy the detection object, so it is rapidly applied in various fields: whether it is discovering new chemical elements, detecting the structure of biomolecules, or even studying the laws of star evolution, spectroscopy Analytics have played a huge role. [0003] However, common spectrum analyzers have obvious limitations: (1) Large volume and heavy weight. This limits the flexibility of testing and the richness of applications, and increases the difficulty of device compatibility and integration. (2) The cost is high. This raises the threshold for the use of spectrum analyzers, which is not conducive to the widespread application of this important t...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a chip-level spectral detection device based on a standard CMOS process, which solves the problem that the existing miniature spectrum analyzer adopts a silicon photonics process, but the compatibility between a single silicon photonics process and a CMOS integrated circuit process is limited. Deficiencies in the processing and analysis capabilities of terminal electrical signals

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