Quantum tunneling and composite principle sensing method and device of spherical scattering field

Abstract

The quantum tunneling and composite principle sensing method and device of spherical scattering field belongs to the technology of precision sensing and measurement. The invention adopts a quantum tunneling and composite principle sensing of a spherical scattering field for a conductor object to be measured. The method comprises: firstly, adjusting the relative distance between a composite principle probe and a measured component, and putting into the working interval; then getting the rough measurement result of an aiming gap by using the principle of spherical scattering field; directly adjusting the aiming gap of the measured object and the micro-measuring ball to the tunneling working interval according to the rough measurement result; converting the aiming gap into the sensing signalby the generation of a three-dimensional quantum tunneling effect. The invention also provides a composite principle sensing device. The quantum tunneling and composite principle sensing method and device of spherical scattering field effectively takes into account the nano-resolution, three-dimensional isotropic, and non-contact sensing characteristics when measuring the conductor object. High resolution measurement of large aspect ratio nano / micro structures is possible.

Description

technical field [0001] The invention belongs to the technical field of precision sensing and measurement, and mainly relates to a sensing method and device based on the composite principle of quantum tunneling and spherical scattering field. Background technique [0002] With the increasing level of precision machining and manufacturing, micro-nano / micro structures with large aspect ratio features are applied in cutting-edge technology fields, and sensing methods and sensing probes for precision measurement of such structures have become current Research hotspots. High resolution and aiming accuracy, three-dimensional isotropy and non-destructive rapid measurement capabilities are the key elements to realize high-precision measurement of large aspect ratio structures. However, it is difficult to achieve nanoscale high resolution, three-dimensional isotropy, large aspect ratio measurement capability and non-destructive Effective balance of measurement characteristics and hi...

AI Technical Summary

Problems solved by technology

The technical characteristics of the sensing technology scheme are: (1) The scheme uses the Schottky radiation effect as the sensing principle, which is a non-contact sensing principle, and can theoretically achieve rapid measurement without damage; (2) The research literature is A preliminary exploration of the principle, the probe is composed of solid metal rods and metal balls directly welded, no complete and specific technical solutions have been given for the measurement of structures with large aspect ratios, and no mechanical structure and signal transmission of the probe have been given Technical solutions such as shielding and shielding interference, etc., cannot realize the actual engineering measurement of structures with large aspect ratios

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