Hybrid flexible touch sensor
A kind of tactile sensor and hybrid technology, which is applied in the direction of instrumentation, measurement of the property and force of piezoelectric resistance materials, and measuring devices, etc. It can solve the problems of limiting the sensitivity of tactile sensors, the measurement range is not too large, and the working range of manipulators is limited. Achieve the effect of miniaturization and expansion of measuring range
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[0038] The following describes the embodiments of the present invention in further detail with reference to the accompanying drawings:
[0039] The structure of the hybrid flexible tactile sensor of the present invention is as follows figure 1 As shown, its composition includes a shielding layer 1, a flexible substrate 2, a planar interdigital electrode 3, an insulating spacer layer 4, an elastic dielectric layer 5 and a contact layer 6;
[0040] Among them, from bottom to top are the shielding layer 1, the flexible base 2, the insulating spacer layer 4, the elastic dielectric layer 5, and the contact layer 6; the insulating spacer layer 4 has a frame-like structure, and the planar interdigital electrode 3 is bonded to On the flexible substrate 2 and in the inner frame of the insulating spacer layer 4.
[0041] The flexible substrate 2 is located on the shielding layer 1, the planar interdigital electrode 3 is adhered to the flexible substrate 2, and the insulating spacer layer 4 is ...
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