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Method for processing milling groove

A processing method and groove milling technology, applied in metal processing equipment, milling machine equipment, manufacturing tools, etc., can solve problems such as difficult to meet product quality requirements and poor milling groove quality, reduce chipping, improve milling effect, The effect of prolonging the service life

Inactive Publication Date: 2019-01-25
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the quality of the milling grooves formed on the polishing body in the prior art is not good, and it is difficult to meet the product quality requirements

Method used

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  • Method for processing milling groove
  • Method for processing milling groove
  • Method for processing milling groove

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Embodiment Construction

[0029] It can be known from the background technology that the performance of the milled grooves formed by the prior art is poor and cannot meet the product quality requirements.

[0030] The material of the polishing body used in the chemical mechanical polishing process is polyphenylene sulfide (PPS). The polyphenylene sulfide material has high mechanical strength and high processing difficulty. Generally, a groove milling machine is used to mill the polishing body, so as to form the milling groove on the polishing body.

[0031] However, in order to improve milling efficiency and obtain higher processing and production efficiency, generally the cutters used for the milling process of the polishing are too sharp, which is prone to chipping, resulting in a decline in the performance of the formed milling slots, which cannot meet the requirements of the product. quality requirements.

[0032] In order to solve the above-mentioned technical problems, the present invention prov...

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Abstract

The invention relates to a method for processing a milling groove, which comprises the following steps of: providing a workpiece to be processed, wherein the material of the workpiece to be processedis polyphenylene sulfide; providing a milling cutter, wherein the milling cutter is a tungsten steel milling cutter; and forming a milling groove on the workpiece to be processed by using the millingcutter. As for forming the milling groove on the workpiece to be processed by adopting a tungsten steel milling cutter, the hardness, wear resistance and arbitrariness of the tungsten steel milling cutter is higher, the sharpness is appropriate, thereby effectively reducing the cutting force between the tungsten steel milling cutter and the workpiece material to be processed, achieving the millingof the polyphenylene sulfide material, being favorable for reducing the occurrence of angle collapse, and improving the smoothness of the edge of the milling groove, so that the performance of the formed milling groove is improved, and the product quality is improved.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a processing method for milling slots. Background technique [0002] Chemical mechanical polishing is also called chemical mechanical planarization (Chemical Mechanical Planarization, CMP) or chemical mechanical polishing (Chemical Mechanical Polishing, CMP). In the semiconductor manufacturing process, surface planarization is an important technology to deal with high-density lithography. In the process of surface planarization, it is very important to control the uniformity of the wafer surface thickness, because only a flat surface without height drop can avoid exposure At the same time, the uniformity of the thickness of the wafer surface will also affect the electrical performance parameters of the electronic device. The uneven thickness will cause differences in the performance of the devices produced on the same wafer and affect the yield. [0003] With the devel...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/26B24B37/34H01L21/306B23C3/28
CPCB24B37/26B23C3/28B24B37/34H01L21/30625
Inventor 姚力军潘杰相原俊夫王学泽罗明浩钱百峰
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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