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Process for magnetron sputtering film plating on surfaces of plastic parts

A technology of magnetron sputtering coating and magnetron sputtering, which is applied in sputtering coating, metal material coating process, ion implantation coating and other directions to achieve the effect of improving quality, improving film quality and compact structure

Active Publication Date: 2019-02-15
JIANGYIN GUANGKE PHOTOELECTRIC PRECISION EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the above problems, the present invention proposes a process for magnetron sputtering coating on the surface of plastic parts, which aims to overcome the disadvantages of the existing surface spraying process of plastic parts, enhance the adhesion of the film layer of plastic parts after coating, and improve the coating quality. quality

Method used

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  • Process for magnetron sputtering film plating on surfaces of plastic parts
  • Process for magnetron sputtering film plating on surfaces of plastic parts

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Embodiment Construction

[0042] The specific implementation manners of the present invention will be further described below in conjunction with the drawings and examples. The following examples are only used to illustrate the technical solution of the present invention more clearly, but not to limit the protection scope of the present invention.

[0043] Such as Figures 1 to 2 Shown is a kind of embodiment of the technique that is used for the magnetron sputtering coating on plastic part surface of the present invention, comprises following process step:

[0044] (1) Pretreatment of plastic parts: preheat the plastic parts, and then perform plasma cleaning;

[0045] (2) Magnetron sputtering coating of plastic parts: use magnetron sputtering method to coat the surface of plastic parts;

[0046] (3) Post-treatment of plastic parts: Evaporation treatment is carried out on the coating surface by evaporation method, or surface modification treatment is carried out on the coating surface by ion source, ...

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Abstract

The invention relates to the technical field of plastic film plating, and discloses a process for magnetron sputtering film plating on the surfaces of plastic parts. The process comprises the steps of(1) pretreatment of the plastic parts, (2) magnetron sputtering film plating of the plastic parts and (3) aftertreatment of the plastic parts, wherein the steps of pretreatment of the plastic parts,magnetron sputtering film plating of the plastic parts and aftertreatment of the plastic parts are all performed on the same magnetron sputtering vacuum film plating machine; the magnetron sputteringvacuum film plating machine comprises a vacuum cavity; and the vacuum cavity is provided with a heating device for preheating the plastic parts, a medium-frequency ion source module for vacuum plasmacleaning or surface modification of the surfaces of the plastic parts, a twin rotating magnetron target for magnetron sputtering film plating of the plastic parts, and an evaporation module for evaporation. The process overcomes the defects in a traditional plastic part surface spraying process, increases the adhesion of film layers of the plastic parts after film plating, and improves the film plating quality.

Description

technical field [0001] The invention relates to the technical field of plastic film coating, in particular to a process for magnetron sputtering film coating on the surface of plastic parts. Background technique [0002] Most of the traditional surface spraying process of plastic parts will directly involve environmental protection issues. In addition, the surface moisture after plastic molding and dust problems due to electrostatic adsorption will directly affect the quality of the film layer. [0003] Therefore, it is necessary to develop a new coating process for plastic parts to solve the above problems. Ion implantation technology is a major research direction, such as low-temperature magnetron sputtering coating technology (which uses the interaction of magnetic field and electric field to control the directional movement of electrons, and makes electrons hit argon gas to generate ions, and then the argon ions bombard the target material, so that sputtering occurs on ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/24C23C14/02
CPCC23C14/022C23C14/24C23C14/352
Inventor 瞿建强瞿一涛黄仕强陆彬锋
Owner JIANGYIN GUANGKE PHOTOELECTRIC PRECISION EQUIP CO LTD
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