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Large-aperture optical element measuring device and method based on pinhole follow-up high-speed scanning confocal microscopy technology

A confocal microscopy, high-speed scanning technology, applied in the direction of testing optical properties, can solve the problems of slow measurement speed and large errors, and achieve the effect of reducing requirements, reducing volume and weight, and reducing volume and weight

Inactive Publication Date: 2019-03-08
HARBIN INST OF TECH
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  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problems of slow measurement speed and large error in measuring large-diameter optical components in existing confocal profiles, thereby providing a large-diameter optical component measurement device and method based on pinhole follow-up high-speed scanning confocal microscopy technology

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  • Large-aperture optical element measuring device and method based on pinhole follow-up high-speed scanning confocal microscopy technology

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specific Embodiment approach 1

[0026] Specific Embodiment 1: A large-aperture optical element measurement device and method based on pinhole follow-up high-speed scanning confocal microscopy technology, which is characterized in that it includes:

[0027] The confocal microscopy device includes an illumination system, a detection system and a displacement actuator;

[0028] The illumination system comprises a laser (1), a coupling optical fiber (2), an objective lens (4), a quarter wave plate (5), an objective lens (6) and a two-dimensional displacement platform (9);

[0029] The laser s light (p light) emitted by the laser (1) passes through the coupling fiber (2) to form a point light source, and the point light source passes through the objective lens (4) to form parallel light, and the parallel light passes through the four After the one-third wave plate (5), the laser light is focused onto the sample to be measured (7) by the objective lens (6);

[0030] The detection system comprises an objective len...

specific Embodiment approach 2

[0034] Specific embodiment two: This embodiment is to further illustrate the large-aperture optical element measurement device and method based on the pinhole follow-up high-speed scanning confocal microscopy technology. In this embodiment, the coupling optical fiber (2) is used as an illumination source at the same time and probe terminals.

specific Embodiment approach 3

[0035] Specific Embodiment Three: This embodiment is to further illustrate the large-aperture optical element measurement device and method based on pinhole follow-up high-speed scanning confocal microscopy technology. In this embodiment, the coupling optical fiber (2) is a multi-channel optical fiber coupling.

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Abstract

The invention discloses a large-aperture optical element measuring device and method based on a pinhole follow-up high-speed scanning confocal microscopy technology, belongs to the technical field ofoptical precision measurement, and aims to solve the problem that the measurement efficiency of a large-aperture optical element is low by the confocal microscopy technology. Laser p light (s light) emitted by a laser is output through a coupling optical fiber, and sequentially passes through an objective lens, a quarter-wave plate and an objective lens, the laser is converged by the objective lens to a to-be-measured sample, reflected light carrying to-be-measured sample information sequentially passes through the objective lens and the quarter-wave plate to be turned into s light (p light),the s light (p light) is converged by the objective lens to the coupling optical fiber, and finally enters a photoelectric detector, a high-speed micro-displacement actuator drives the coupling optical fiber to scan, and a measured point can be measured. The large-aperture optical element measuring device and method are suitable for measuring the surface contour of the large-aperture optical element.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and mainly relates to a large-diameter optical element measurement device and method based on pinhole follow-up high-speed scanning confocal microscopy technology. Background technique [0002] With the continuous development of optical processing and detection technology, large-aperture optical components have become one of the key components that play a supporting role in the fields of astronomical optics, space optics, and ground-based space target detection and recognition, laser atmospheric transmission, and inertial confinement fusion (ICF). First, it is also the product of the close combination of optical system design and ultra-precision processing technology. The key to restricting the processing level of large-diameter optical components depends on the detection methods and instruments that are compatible with manufacturing requirements; confocal profilometer is a ...

Claims

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Application Information

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IPC IPC(8): G01M11/02
CPCG01M11/02
Inventor 刘俭谷康刘辰光王宇航谭久彬
Owner HARBIN INST OF TECH
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