Method for preparing electronic grade hydrazine hydrate by purifying hydrazine hydrate

A technology of hydrazine hydrate and electronic grade, which is applied in the field of purifying commercial hydrazine hydrate to prepare electronic grade hydrazine hydrate, which can solve the problems of not being able to use integrated circuits and not reaching such a high level

Inactive Publication Date: 2019-03-12
YIBIN HAIFENG HERUI
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0012] According to the existing industrial hydrazine hydrate product standard HG/T 3259-2012, metal ions such as iron and heavy metals (calculated as Pb) in hydrazine hydrate products are only required to be no more than 0.0005%, that is, 5000ppb, and the existing industrial hydrazine hydrate Most of the metal content in the hydrazine hydrate is 3000-5000ppb. Such hydrazine hydrate will not affect its many uses, but it cannot be used in integrated circuits, because if it is used in integrated circui

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  • Method for preparing electronic grade hydrazine hydrate by purifying hydrazine hydrate

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[0031] Example 1

[0032] A method for purifying hydrazine hydrate to prepare electronic grade hydrazine hydrate, including the following steps: first prepare commercial hydrazine hydrate, the concentration of hydrazine hydrate in the commercial hydrazine hydrate is 80%, and the metal ion content is determined to be 3500 ppb, and then the commercial hydrazine hydrate is hydrated Hydrazine continuously passes through a chelating resin column made of plexiglass, and the temperature of the system is controlled to 40°C. The chelating resin used is based on styrene resin and connected to -CH 2 N(CH 2 COOH) 2 The structure is composed of special functional groups, the diameter of the chelating resin column is 5cm, the height is 80cm, and the volume of a single resin column is 0.00157m 3 The average flow rate of commercial hydrazine hydrate is 245ml per minute, and the total flow rate is 430L. After the hydrazine hydrate passes through the chelating resin column, it is filtered through a ...

Example Embodiment

[0035] Example 2

[0036] A method for purifying hydrazine hydrate to prepare electronic grade hydrazine hydrate, including the following steps: first prepare commercial hydrazine hydrate, the concentration of hydrazine hydrate in the commercial hydrazine hydrate is 80%, and the metal ion content is determined to be 4550ppb, and then the commercial hydrazine is hydrated Hydrazine continuously passes through a chelating resin column made of plexiglass, and the temperature of the system is controlled at 60°C. The chelating resin used is based on styrene resin as the skeleton and connected to -CH 2 N(CH 2 COOH) 2 The structure is composed of special functional groups, the diameter of the chelating resin column is 5cm, the height is 80cm, and the volume of a single resin column is 0.00157m 3 The average flow rate of commercial hydrazine hydrate is 245ml per minute, and the total flow rate is 200L. After the hydrazine hydrate passes through the chelating resin column, it is filtered thr...

Example Embodiment

[0039] Example 3

[0040] A method for purifying hydrazine hydrate to prepare electronic grade hydrazine hydrate, including the following steps: first prepare commercial hydrazine hydrate, the concentration of hydrazine hydrate in the commercial hydrazine hydrate is 80%, and its metal ion content is determined to be 4550ppb, and then the commercial hydrazine hydrate is hydrated Hydrazine continuously passes through a chelating resin column made of plexiglass, and the temperature of the system is controlled at 45°C. The chelating resin used is based on divinylbenzene resin and connected to -CH 2 N(CH 2 COOH) 2 The structure is composed of special functional groups, the diameter of the chelating resin column is 5cm, the height is 80cm, and the volume of a single resin column is 0.00157m 3 The average flow rate of commercial hydrazine hydrate is 245ml per minute, and the total flow rate is 430L. After the hydrazine hydrate passes through the chelating resin column, it is filtered thro...

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Abstract

The invention discloses a method for preparing electronic grade hydrazine hydrate by purifying hydrazine hydrate, relating to the technical field of chemical purification. The method comprises the following steps: enabling a commodity hydrazine hydrate to pass through chelate resin firstly with a system controlled to be 40-60 DEG C and then pass through a filter with a pore size of 0.05 mu m to obtain qualified electronic grade hydrazine hydrate; the chelate resin is formed by taking a crosslinked polymer as a skeleton and connecting with a special functional group with a -CH2N(CH2COOH)2 structure. The electronic grade hydrazine hydrate product prepared by the invention is extremely low in metal ion content, has appropriate particle sizes, does not have a color, has very good quality, andthus is fully applicable to the field of integrated circuits.

Description

technical field [0001] The invention relates to the technical field of chemical purification, in particular to a method for preparing electronic-grade hydrazine hydrate by purifying commercial hydrazine hydrate. Background technique [0002] Hydrazine hydrate, also known as: hydrazine hydrate, chemical formula is N 2 h 4 ·H 2 O, a strong reducing agent, is an important chemical raw material, and is also a raw material for medicine, pesticides, dyes, foaming agents, developers, antioxidants, etc.; it is mainly used for boiler water deoxidation, high-purity metal production, and organic compound synthesis. And reduction, separation of rare elements, and also used in the manufacture of rocket fuel and explosives. With the advancement of technology and the development of society, the application fields of hydrazine hydrate are also expanding in recent years. [0003] Hydrazine hydrate is very suitable for production and use on integrated circuits (ICs) because of its strong r...

Claims

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Application Information

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IPC IPC(8): C01B21/16
CPCC01B21/16
Inventor 陈尚思柴进祥杨郭金永奎舒帮会刘志明罗浩
Owner YIBIN HAIFENG HERUI
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