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Multi-axis paper-based acceleration sensor and preparation method thereof

An acceleration sensor, paper-based technology, applied in the sensor field, can solve the problems of increased manufacturing costs, increased cost, environmental pollution, etc., and achieves the effects of reducing the difficulty of the preparation process, reducing the preparation cost, and reducing the cost.

Pending Publication Date: 2019-03-15
JIANGSU JICUI MICRO NANO AUTOMATION SYST & EQUIP TECH RES INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The traditional processing technology of the acceleration sensor is too complicated. If an error occurs in a certain link in the processing process, the sensitivity of the prepared acceleration sensor is often not high, and it cannot even be used.
At the same time, the traditional acceleration sensor will pollute the environment during the preparation process, and the expensive silicon wafer substrate also increases its manufacturing cost, all of which lead to the lack of reliability and cost increase of the traditional acceleration sensor

Method used

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  • Multi-axis paper-based acceleration sensor and preparation method thereof
  • Multi-axis paper-based acceleration sensor and preparation method thereof
  • Multi-axis paper-based acceleration sensor and preparation method thereof

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Experimental program
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Embodiment 1

[0028] Such as Figure 1~4 As shown, this embodiment discloses a multi-axis paper-based acceleration sensor, including a single-axis paper-based acceleration sensor 4 and a paper-based mounting carrier 2 . The above-mentioned installation carrier 2 is made based on cutting, stamping or laser cutting process. In the technical solution of this embodiment, it is preferable to use a low-power laser cutting machine to cut, pre-design the shape of the installation carrier 2, and use cardboard as the base material to cut to obtain such as Figure 4 the shape shown. Theoretically, all types and varieties of paper can be used as the substrate of the installation carrier 2, but among all kinds of paper, the installation carrier 2 made of white cardboard has the best performance, including the sensitivity and accuracy of the acceleration sensor. , and reliability etc.

[0029] The multi-axis paper-based acceleration sensor of the present application is most suitable for two-axis paper-...

Embodiment 2

[0041] This embodiment discloses a method for preparing a multi-axis paper-based acceleration sensor, including:

[0042] Based on cutting, stamping or laser cutting process to make the paper-based installation carrier; preferably use a low-power laser cutting machine to cut, pre-design the shape of the installation carrier 2, and use cardboard as the base material to cut to obtain such as Figure 4 the shape shown. Specifically, use a low-power laser cutting machine to cut out such as Figure 4 The planar structure of the mounting carrier is shown, and the mounting carrier 2 is formed into a cube shape by a series of folds.

[0043] The paper-based carrier 8 is made based on cutting, punching or laser cutting process, preferably using a low-power laser cutting machine to cut the paper-based carrier 8 with cardboard as the base material. Prepare a uniaxial paper-based acceleration sensor on the above-mentioned paper-based carrier 8; the step of preparing a uniaxial paper-bas...

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Abstract

The invention discloses a multi-axis paper-based acceleration sensor with simple preparation process, high reliability, environmental protection and low cost, which comprises a single-axis paper-basedacceleration sensors and an installation carrier made of and paper base; the single-axis paper-based acceleration sensors are provided with at least two, and each single-axis paper-based accelerationsensor operates independently; the installation carrier is provided with a two-axis installation part or a three-axis installation part, and the two single-axis paper-based acceleration sensors are fixed on the two-axis installation parts; or the three single-axis paper-based acceleration sensors are fixed on the three-axis installation part. According to the multi-axis paper-based acceleration sensor, due to the fact that the paper base is easy to fold and deform, the difficulty of a preparation process and the environment-friendly characteristic of the paper base can be reduced; compared with a prior silicon-based acceleration sensor, the cost of the multi-axis paper-based acceleration sensor is reduced on the premise that the sensitivity of the paper-based acceleration sensor is not influenced, meanwhile, the environment cannot be polluted, and the method is green and environment-friendly.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a multi-axis paper-based acceleration sensor, and also to a preparation method of the multi-axis paper-based acceleration sensor. Background technique [0002] The acceleration sensor is a highly sensitive device that can measure the acceleration changes in the surrounding environment, and it is also an important part of the application fields such as automobile safety, smart products, GPS navigation and aviation. It mainly uses silicon as the base material, and is composed of mass blocks, elastic elements, dampers, sensitive elements, and adjustment circuits. It converts acceleration signals into corresponding electrical signals and can be applied to the measurement of multi-directional acceleration. But at present, it needs to go through photolithography, thin film deposition, doping, etching and chemical mechanical polishing, etc., and even micro-processing manufacturing techn...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/12G01P15/18
CPCG01P15/12G01P15/18
Inventor 翟荣安马海波刘新宇汝长海孙钰
Owner JIANGSU JICUI MICRO NANO AUTOMATION SYST & EQUIP TECH RES INST CO LTD