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A heating element with metal-ceramic composite coating

A metal-ceramic composite and heating element technology, which is applied in the direction of heating element materials, metal material coating technology, ohmic resistance heating parts, etc., can solve problems such as peeling, accelerated coating cracking, and large stress

Active Publication Date: 2021-08-03
SUZHOU IMOTECH MATERIALS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the heating element is used at a temperature above 1700°C or even 2200°C, and undergoes rapid heating and rapid cooling process repeatedly, the stress between the ceramic phase coating and the metal substrate due to the difference in thermal expansion coefficient is very large, which will accelerate the cracking and cracking of the coating. peeling off

Method used

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  • A heating element with metal-ceramic composite coating
  • A heating element with metal-ceramic composite coating

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preparation example Construction

[0039] The present invention also provides a method for preparing a heating element with a metal-ceramic composite coating, preferably comprising the following steps:

[0040] A) mixing metal powder and ceramic powder to obtain coating material;

[0041] B) coating the coating material on the surface of the metal substrate to obtain a semi-finished product;

[0042] C) Sintering the semi-finished product to obtain a heating element with a cermet composite coating.

[0043] In the present invention, the kind and amount of the metal powder are consistent with the kind and amount of the metal phase described above, and the kind and amount of the ceramic powder are consistent with the kind and amount of the ceramic phase described above , and will not be repeated here.

[0044] In the present invention, the metal matrix phase is preferably processed to a size suitable for the heating chamber and then coated.

[0045] In the present invention, the coating can be a coating proces...

Embodiment 1

[0055] First, the size of the tungsten sheet or tungsten plate is processed according to the drawings to obtain a tungsten or tungsten alloy heating element substrate suitable for the MOCVD reaction cavity. 5 g of polyvinyl alcohol was dissolved in 95 g of deionized water as a solution for preparing a suspension slurry. 25 g of tantalum carbide powder, 25 g of HfC powder, and 80 g of pure tungsten powder were weighed, and the above-mentioned metal powder and ceramic powder were mechanically mixed for 2 hours to obtain coating powder. Add the metal and ceramic mixed powder into the prepared polyvinyl alcohol solution, and stir for 30 minutes to form a suspended slurry. The slurry is sprayed onto the processed tungsten substrate with a spray gun, and then placed in an oven for drying.

[0056] After drying, the heating element was placed in a high-temperature hydrogen furnace for sintering at 1500° C. for 90 minutes, and cooled, and the coating thickness was 120 μm. The coatin...

Embodiment 2

[0060] The heating element was prepared according to the method shown in Example 1, except that the coating composition was 20% TaC and 80% pure tungsten powder, and the coating porosity was 35%;

[0061] According to this example, a heating element with a tungsten-tantalum carbide composite ceramic coating was prepared. The bonding strength between the coating and the tungsten substrate was 110 MPa, and the thermal emissivity was 0.49. coating structure such as figure 2 shown.

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Abstract

The object of the present invention is to provide a heating element with a metal-ceramic composite coating, comprising a metal substrate and a metal-ceramic composite coating compounded on the surface of the metal substrate; the metal-ceramic composite coating has a porous structure; the metal The ceramic composite coating includes a metal phase and a ceramic phase; the metal phase is pure tungsten and / or tungsten alloy powder; the ceramic phase is a carbide of a rare metal, a nitride of a rare metal, an oxide of a rare metal, boron One or more of carbides, nitrides of boron, oxides of boron, alumina and magnesia. The ceramic phase in the present invention can significantly prevent the densification of the metal powder in the coating during high-temperature heating, and can better maintain the porous structure of the coating, and at the same time, can improve the thermal emissivity of the coating; further, Since the coating has a loose porous structure, it can effectively reduce the thermal stress caused by the difference in thermal expansion coefficient between the substrate and the coating, and the coating is not easy to crack and peel off.

Description

technical field [0001] The invention belongs to the technical field of heating elements, and in particular relates to a heating element with a metal-ceramic composite coating. Background technique [0002] In the field of high temperature heating, such as high temperature heating furnace, CVD (chemical vapor deposition), MOCVD (organic chemical vapor deposition) equipment, high melting point metals or their alloys such as tungsten, molybdenum, tantalum, etc. are often used as heating elements. [0003] In chemical vapor deposition (CVD) and organic compound vapor deposition (MOCVD) equipment, sheet or filament tungsten metal is usually used as a heating element, and the heat generated by the heating element heats the semiconductor wafer carrier on it by thermal radiation. , the carrier plate then transfers the heat to the crystal growth substrate, so that the substrate reaches the set process temperature. [0004] MOCVD equipment is a key equipment for preparing light-emitt...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05B3/02H05B3/10C23C16/46
CPCC23C16/46H05B3/02H05B3/10
Inventor 都业志李玉花
Owner SUZHOU IMOTECH MATERIALS TECH CO LTD