A silicon-based optical antenna and its preparation method
An optical antenna and grating technology, applied in the field of antennas, can solve the problems of serious light divergence, low radiation efficiency, and large grating lobe energy, and achieve a small far-field divergence angle, high radar scanning resolution, and high grating lobe suppression effect. Effect
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[0034] figure 2 It is a schematic flow chart of a method for preparing a silicon-based optical antenna according to an embodiment of the present invention, image 3 It is a schematic diagram of the structure of the first SOI substrate according to the embodiment of the present invention, Figure 4 It is a schematic diagram of the structure of the second SOI substrate according to the embodiment of the present invention, Figure 5 It is a schematic diagram of the structure of the third SOI substrate according to the embodiment of the present invention, such as figure 2 As shown, the method includes:
[0035] Step S01, obtaining a first SOI substrate, the first SOI substrate at least includes a substrate silicon layer 10, a buried oxide layer 20 and a top silicon layer 30;
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