An integrated transformer with multiple winding coils fabricated by micro-nano-fabrication

Abstract

The invention discloses a micro-nano machined and manufactured integrated transformer with multiple winding coils. The winding coils and one of magnetic cores are separated from the other one of the magnetic cores through an insulating material, parts of the winding coils are arranged in a mutual staggered mode, wherein one or more turns of top wire layers of the coils of the winding coils windingthe magnetic core is interchanged with bottom wire layers of the winding coils corresponding to the adjacent magnetic core through through-holes, and one or more turns of the bottom wire layers of the coils of the winding coils winding the magnetic core is interchanged with the top wire layers of the winding coils corresponding to the adjacent magnetic core through the through-holes; and the through-holes are conductive through-holes and provide connection points for connecting top layer wires to bottom layer wires, the width of the through-holes is less than or equal to the wire width of thewinding coils, and the integrated transformer is prepared by layered deposition micro-nano machining. The micro-nano machined and manufactured integrated transformer has the characteristic of low parasitic capacitance while realizing high coupling.

Description

technical field [0001] The invention relates to an integrated transformer made by micro-nano processing. Background technique [0002] An increasing number of electrical devices require signal and power galvanic isolation, such as medical equipment, industrial equipment and power electronics, in a range of applications where this isolation is required to meet safety standards and performance goals. [0003] Optical isolation is one of the most common methods of providing signal isolation. But for high data rate signals, optical isolation can consume a lot of power. At the same time, as the main component of the optical isolator, the performance of the optocoupler will degrade over time, seriously affecting the service life and reliability of the system. [0004] For the same amount of data transmission, the energy consumption required by electromagnetic isolation is significantly lower than that of optical isolation. For electromagnetic isolation, a transformer is used to...

AI Technical Summary

Problems solved by technology

An alternative to reduce capacitance is to arrange the winding coils in a non-staggered arrangement, for example, in the order of P:P:P:P:S:S:S:S, with primary and secondary windings The coils are arranged in two regions, however, the electromagnetic coupling between the primary and secondary sides in this scheme will be significantly weakened due to the increased leakage inductance

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