Processing method of axial cone mirror

A processing method and technology of axicon mirrors, applied in stone processing equipment, stone processing tools, metal processing equipment, etc., can solve the problems that the cone surface is not continuous and cannot be polished, and achieve low processing cost, strong activity, and high processing efficiency high effect

Active Publication Date: 2019-05-07
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI +1
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  • Application Information

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Problems solved by technology

The conical surface of the axicon mirror is not continuous, it is bent at t

Method used

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  • Processing method of axial cone mirror
  • Processing method of axial cone mirror
  • Processing method of axial cone mirror

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[0021] The present invention will be further described below with reference to the drawings and specific embodiments of the specification.

[0022] A high-precision and high-efficiency axicon optical element processing method is suitable for concave cone mirror and convex axicon mirror, the main process see figure 1 .

[0023] In the embodiment, a cone lens with a diameter of 140mm, a cone angle of 140°, a center thickness H of 5mm, and a through hole of φ2mm in the center is the processing object. figure 2 , The processing requirements are that the surface PV is better than 2μm, the surface roughness is better than 0.5nm, and the finish is 40 / 20.

[0024] The processing method includes the following steps:

[0025] Step 1) Cone surface molding: Use an optical machining center to process the conical surface of the axicon,

[0026] The parameters of the axicon to be processed are as follows: the diameter D of the axicon is 140mm, the cone angle A is 140°, the center thickness H is 5mm, ...

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Abstract

The invention relates to a processing method of an axial cone mirror. The processing method comprises the following steps of (1) performing conical surface shaping: performing conical surface shapingwith an optical processing center; (2) performing crude polishing: performing quick polishing with a polyurethane polishing disk, removing knife patterns and increasing roughness until the axial conemirror is polished to be bright; (3) performing precise polishing: performing fine polishing with atmosphere plasma polishing equipment, so that the roughness and surface shape precision is further improved; (4) performing conformal refinement: performing refinement with flexible small tools, so that the surface shape of the axial cone mirror finally achieves the requirements; and (5) performing detection: performing detection on the processed axial cone mirror. Through the adoption of the processing method disclosed by the invention, the problems that in the polishing process of the axial cone mirror, the processing efficiency is low, surface defects are generated and the surface shape precision of the edge region of the conical angles is difficult to control are solved.

Description

technical field [0001] The invention belongs to the field of optical processing, in particular to a processing method of an axicon. Background technique [0002] In the deep ultraviolet lithography illumination system, the cone angle of the axicon mirror splits the incident light beam to convert the traditional illumination mode into a ring illumination mode, and by changing the distance between the axicon lens groups, the lithography lines can be optimally resolved The rate plays a key role in improving the integration of integrated circuits. Therefore, higher requirements are put forward for the processing of axicon mirrors. [0003] An axicon is a tapered prism with an apex angle and an α angle. Unlike a planar convex lens, a biconvex lens, or an aspheric lens that focuses along the optical axis, the axicon focuses to multiple points along the optical axis. The conical surface of the axicon mirror is not continuous, it is bent at the center point, and cannot be polished...

Claims

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Application Information

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IPC IPC(8): B24B1/00B24B13/00B24B13/02B24B27/033B24B49/12B28D1/22G01B11/24G01B11/30
Inventor 张彦超顿爱欢邵建达吴令奇吴福林徐学科
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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