Detection system and method for trace impurity silicon tetrachloride in electronic gas boron trichloride

Abstract

The invention relates to the technical field of gas chromatography detection, and discloses a detection system for trace impurity silicon tetrachloride in electron gas boron trichloride. The detectionsystem for the trace impurity silicon tetrachloride in the electron gas boron trichloride comprises a switching valve V1, a switching valve V2, a quantitative tube, a first carrier gas path, a secondcarrier gas path, a pipeline, a first capillary column, a second capillary column, a first venting needle valve, a second venting needle valve and a helium ionization detector. The two ends of the quantitative tube separately communicates with the switching valve V1, and the first carrier gas path and the second carrier gas path separately communicates with the switching valve V1. The switching valve V1 is in communication with the switching valve V2, and the pipeline, the second venting needle valve and the helium ionization detector separately communicates with the switching valve V2. The invention further provides a detection method for the trace impurity silicon tetrachloride in the electron gas boron trichloride. The detection system for the trace impurity silicon tetrachloride in the electron gas boron trichloride can well detect the trace amount and low concentration component, the detection limit can reach 0.1 ppm or less, and the detection method can accurately quantify SiCl4without enabling the result to be excessive high or low.

Description

Technical field [0001] The invention relates to the technical field of gas chromatography detection, in particular to a detection system and method for the trace impurity silicon tetrachloride in the electronic gas boron trichloride. Background technique [0002] At present, it is used to analyze the high-purity electronic gas boron trichloride (BCl 3 ) The gas chromatograph generally uses the traditional TCD and the current helium ionization detector. Among them, the technology of the TCD thermal conductivity detector is traditional or backward, and the silicon tetrachloride (SiCl 4 ) The detector has a low sensitivity response and can only detect a concentration of several hundred to several thousand ppm; while a helium ionization detector is used for the impurity SiCl 4 When analyzing, the separation chromatographic column selected is mostly the chromatographic column filled with SE-30 stationary liquid, because the chromatographic column is the main body gas BCl 3 With impurit...

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Problems solved by technology

[0005] The present invention aims at the disadvantage of being unable to accurately quantify and separate silicon tetrachloride in boron trichloride in the prior art, and provides a trace impurity SiCl in boron trichloride of electronic gas 4 The detection system and method, the system includes two kinds of capillary columns connected in series gas path, in this method, the sample injection is switched to the positive gas path of switching valve V1, and the high-purity electronic gas boron trichloride in the quantitative tube enters from the carrier gas load into the first capillary column and the second capillary column to separate the BCl 3 Trace impurities in SiCl 4

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