A miniature encapsulated ionization gauge
An ionization gauge and encapsulation technology, which is applied in the field of micro-encapsulation ionization gauges, can solve the problems of the inability to extend the measurement lower limit of micro-ionization gauges, limit the characteristics of micro-packages, and electron bombardment to eliminate the high-temperature hot cathode effect and prolong the trajectory. length, to overcome the effect of low sensitivity
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[0027] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0028] According to the working principle of the ionization gauge, improving the sensitivity is a practical and feasible technical way to extend this kind of miniature package ionization gauge. Therefore, according to the theoretical calculation formula of the sensitivity S, it can be known that
[0029]
[0030] Among them, σ represents the ionization cross section, k is the Boltzmann constant, T is the Kelvin temperature, and L is the length of the trajectory of electrons in the ionization region. Therefore, extending L is an effective technical approach to improve the sensitivity of the miniature ionization gauge.
[0031] This embodiment provides a kind of miniaturized encapsulation type ionization gauge, such as figure 2 As shown, the ionization gauge includes a carbon nanotube cathode substrate 1, a carbon nanotube array 2, a gate electrode 3, a...
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