A symmetrical carbon nanotube cathode ionization gauge

Abstract

The invention discloses a symmetrical type carbon nanotube cathode ionization gauge. A carbon nanotube array capable of achieving electron field emission at room temperature is taken as a cathode, interferences of the high-temperature thermionic cathode to a heat sensitive, light sensitive and strong magnetic field system are overcome, and a power consumption demand is reduced based on a field emission mechanism. The carbon nanotube array cathode grows on two faces of a substrate, and symmetrical double-electrode arrangement is adopted; and, on the premise that the complexity of a circuit is not changed, the lengths of electron trajectories are effectively prolonged, and improvement of the sensitivity of an ionization gauge in the kind is facilitated. Furthermore, higher-voltage anodes 5 are added between gate electrodes 4 and collecting electrodes 6, so electrons oscillates between the gate electrodes 4 and the collecting electrodes 6, the electron trajectories are also prolonged, and the sensitivity of the ionization gauge is further improved.

Description

technical field [0001] The invention relates to a symmetrical carbon nanotube cathode ionization gauge, which belongs to the technical field of vacuum measurement. Background technique [0002] With the development of science and technology, high-tech fields have put forward new requirements for heat sensitivity, strong magnetic interference, and high power consumption in the vacuum measurement process, such as aerospace, nuclear fusion, surface science, micro-nano electronics and other high-tech fields , all put forward more urgent requirements for vacuum measurement. The application of carbon nanotube cathodes provides new ideas for solving various problems caused by high-temperature hot filaments. [0003] The electron emitter of the ionization gauge produces electrons, forming an electron flow I e , under the confinement electric field formed between the electrodes of the ionization gauge, the electrons oscillate and collide with gas molecules to generate gas phase ion...

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Problems solved by technology

[0005] Compared with the hot filament emitter, the carbon nanotube cathode has a higher current density at a higher voltage, but the total emission current is smaller, which is not conducive to the detection of weak ion current signals. At the same time, there are electrons in the traditional three-pole ionization gauge. The problem of short motion path and low sensitivity limits the development of miniature ionization gauges

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