Diamond solution gate field effect transistor system
A field-effect transistor and diamond technology, which can be used in radio wave measurement systems, use of re-radiation, geophysical measurement, etc., can solve the problem of affecting the effectiveness and reliability of detection, communication, positioning and navigation, limiting the development of underwater acoustic technology, and sound wave propagation. Low speed and other problems, to achieve the effect of expanding underwater communication and detection means, reducing limitations, and fast transmission speed
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[0041] The above-mentioned preparation method of a diamond solution gate field effect transistor system comprises the following steps:
[0042] Step 1: Carry out acid-base treatment to the diamond substrate 1, and dry it, and epitaxially obtain a single crystal diamond epitaxial film 2 on the diamond substrate 1, and clean the surface of the single crystal diamond epitaxial film 2; epitaxial single crystal diamond epitaxial film 2 technologies are microwave plasma vapor phase chemical deposition technology, hot wire chemical vapor deposition technology, DC jet plasma technology, etc.;
[0043] Step 2, using photolithography technology, metal deposition technology and lift-off technology to form drain electrode 3 and source electrode 4 on the upper surface of single crystal diamond epitaxial film 2;
[0044] Step 3, connecting one end of the resistor 5 to the drain 3 through a wire;
[0045] Step 4, connect the other end of the resistor 5 to the positive pole of the power supp...
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