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Bulb tube voltage control method and device, and computer readable storage medium

A tube voltage and control method technology, applied in the digital field, can solve problems such as weak robustness, low efficiency, and difficult PID parameter setting, and achieve the effect of ensuring optimal output and improving robustness

Active Publication Date: 2019-06-07
SHENZHEN ANGELL TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The main purpose of the embodiments of the present invention is to provide a tube voltage control method, device and computer-readable storage medium, which can at least solve the problem of the high-voltage generator kV control using digital PID control technology in the related art. The stickiness is not strong, and the optimal output cannot be guaranteed during the entire exposure time, and when the high-voltage generator has many power levels, the PID parameter setting is difficult and the efficiency is low.

Method used

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  • Bulb tube voltage control method and device, and computer readable storage medium
  • Bulb tube voltage control method and device, and computer readable storage medium
  • Bulb tube voltage control method and device, and computer readable storage medium

Examples

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no. 1 example

[0030] In order to solve the kV control of the high-voltage generator using digital PID control technology in related technologies, the robustness of the PID parameters is not strong after setting, and the optimal output cannot be guaranteed during the entire exposure time, and when the high-voltage generator has many power levels, the PID Due to the technical problems of difficult parameter setting and low efficiency, this embodiment proposes a tube voltage control method, which is applied to exposure consoles, field programmable gate array FPGA chips, metal oxide semiconductor field effect transistors MOSFETs, and high-voltage fuel tanks. and high pressure generators for bulbs, such as figure 1 Shown is the basic flowchart of the tube voltage control method provided in this embodiment. The tube voltage control method proposed in this embodiment includes the following steps:

[0031] Step 101, before the exposure of the high-voltage generator starts, the FPGA chip is controll...

no. 2 example

[0057] In order to understand the bulb voltage control method in the embodiment of the present invention more intuitively, the embodiment of the present invention also provides a refined bulb voltage control method, such as figure 2 Shown is a schematic flow chart of the refined tube voltage control method provided in this embodiment. The tube voltage control method proposed in this embodiment includes the following steps:

[0058] Step 201, before the exposure of the high-voltage generator starts, control the FPGA chip to determine the initial PID parameters according to the exposure parameters selected by the exposure console; the exposure parameters include the target tube voltage, target tube current and target exposure time, and the PID parameters include kp parameters, ki parameters and kd parameters;

[0059] Step 202. When the FPGA chip triggers the hand brake of the exposure console to close and the high-voltage generator starts to expose, the inverter module includi...

no. 3 example

[0070] In order to solve the kV control of the high-voltage generator using digital PID control technology in related technologies, the robustness of the PID parameters is not strong after setting, and the optimal output cannot be guaranteed during the entire exposure time, and when the high-voltage generator has many power levels, the PID For the technical problems of difficult parameter setting and low efficiency, this embodiment shows a bulb voltage control device, which is applied to exposure consoles, field programmable gate array FPGA chips, metal oxide semiconductor field effect transistors MOSFETs, and high-voltage fuel tanks. And the high pressure generator of the bulb, please refer to image 3 , the bulb voltage control device of the present embodiment includes:

[0071] The PID parameter determination module 301 is used to control the FPGA chip to determine the initial PID parameters according to the exposure parameters selected by the exposure console before the ex...

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Abstract

The embodiments of the invention disclose a bulb tube voltage control method and device, and a computer readable storage medium. In the single-time exposure process of a high-voltage generator, through a fuzzy PID algorithm, tube voltage output values sampled by an FPGA chip are calculated to obtain the voltage error and the voltage error changing amount; fuzzy reasoning and ambiguity resolving are conducted to determine the PID parameter increment, and set PID parameters determined by the PID parameter increment are calculated through an incremental PID algorithm to obtain the pulse width increment of PFM waves; and then the frequency of the PFM waves is adjusted through the pulse width increment, and the bulb tube voltage of a high-voltage oil tank is controlled to be adjusted in an adaption mode. The PID parameters are set in a self-adaption mode in real time through the fuzzy PID algorithm, it can be effectively guaranteed that the high-voltage generator conducts optimal output atthe whole exposure time, and the robustness of the set PID parameters and the efficiency of PID parameter setting are improved.

Description

technical field [0001] The present invention relates to the field of digital technology, in particular to a ball tube voltage control method, device and computer-readable storage medium. Background technique [0002] In the high-voltage generator control system, the bulb voltage (both expressed in kV below) and the bulb current (both expressed in mA below) are the two most important technical indicators of the system, and the rising time of kV, overshoot, and ripple The size of the wave needs to meet the accuracy requirements in the national standard. With the current higher and higher requirements for the output power of the high-voltage generator, the exposure time is getting shorter and shorter, and the control of the kV of the high-voltage generator also requires higher requirements. [0003] At present, the commonly used kV control technology is digital PID control technology. Digital PID control technology performs PID parameter setting for each group of exposure para...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B11/42
Inventor 田子良
Owner SHENZHEN ANGELL TECH
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