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Silicon wafer boat transfer mechanism and transfer method

A technology for silicon wafer boats and silicon wafers, applied to conveyor objects, electrical components, transportation and packaging, etc., can solve problems such as low efficiency, high labor intensity, damage to silicon wafer boats, etc., to improve efficiency and effect, and improve processing Efficiency, the effect of reducing production costs

Active Publication Date: 2021-03-05
苏州映真智能科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the wafer boat is heavy after loading silicon wafers, manual handling is labor-intensive and inefficient, and improper operation is prone to problems such as inaccurate placement of the wafer boat and damage to the wafer boat, which reduces the processing efficiency of solar cells

Method used

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  • Silicon wafer boat transfer mechanism and transfer method
  • Silicon wafer boat transfer mechanism and transfer method

Examples

Experimental program
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Effect test

Embodiment 1

[0036] This embodiment provides a silicon wafer boat transfer mechanism, which is used for grabbing a silicon wafer boat full of silicon wafers, and after correcting the position of the silicon wafer boat, placing the silicon wafer boat on a transport trolley. The silicon wafer boat transfer mechanism can be installed on the manipulator, driven by the manipulator to go back and forth between the boat taking position (located at the silicon wafer loading station) and the boat releasing position (located on the transport trolley).

[0037] see figure 1 , figure 1 The structure of the silicon wafer boat transfer mechanism in this embodiment is shown. The silicon wafer boat transfer mechanism includes a base plate 10 on which a lifting cylinder 20, an X-axis normalization unit and a Y-axis normalization unit are installed. unit, a vacuum chuck 30 is connected to the bottom of the lift cylinder 20 . The silicon wafer boat transfer mechanism can be installed on the manipulator thr...

Embodiment 2

[0053] This embodiment provides a silicon wafer boat transfer method using the silicon wafer boat transfer mechanism in Embodiment 1. Please also refer to figure 2 , figure 2 The flow of the silicon wafer boat transfer method is shown, and the silicon wafer boat transfer mechanism has been described in detail in the description of Embodiment 1, and will not be repeated here.

[0054] Described silicon wafer boat transfer method comprises the steps:

[0055] S1. The wafer boat transfer mechanism is moved to the boat-taking position, and the vacuum chuck 30 is vacuumed to suck the wafer boat located at the boat-taking position;

[0056] Wherein, the floating cylinder 71 is ventilated at first, and the horizontal position of the lifting cylinder 20 is fixed, thereby fixing the horizontal position of the vacuum chuck 30 connected with the lifting cylinder 20, and then the wafer boat transfer mechanism is moved to take Boat position; the silicon wafer boat transfer mechanism is...

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Abstract

The invention discloses a silicon wafer boat transfer mechanism. The silicon wafer boat transfer mechanism comprises a substrate, wherein a lifting air cylinder, an X-axis centering unit and a Y-axiscentering unit are arranged on the substrate, a vacuum suction disc is connected to the bottom of the lifting air cylinder, the lifting air cylinder is arranged below the substrate and is used for driving the vacuum suction disc to ascend or descend, the vacuum suction disc is used for absorbing a silicon wafer boat, the X-axis centering unit is used for centering the silicon wafer boat absorbed by the vacuum suction disc along an X-axis direction, and the Y-axis centering unit is used for centering the silicon wafer boat absorbed by the vacuum suction disc along a Y-axis direction. By the silicon wafer boat mechanism, the efficiency and the effect of the silicon wafer boat transported to a transmission trolley are improved, the processing efficiency of a solar cell silicon wafer is further improved, automatic processing production of a crystal-silicon solar cell can be achieved, and the production cost is reduced. The invention also provides a silicon wafer boat transfer method applied to the silicon wafer boat transfer mechanism.

Description

technical field [0001] The invention relates to the field of crystalline silicon solar cell processing, in particular to a silicon wafer boat transfer mechanism and transfer method. Background technique [0002] In the processing and production of crystalline silicon solar cells, after silicon wafers are loaded into silicon wafer boats (such as metal boats) from flower baskets, the silicon wafer boats full of silicon wafers need to be transported to process furnaces for corresponding process treatment. [0003] In the prior art, the silicon wafer boat is placed vertically at the waiting position after being filled with silicon wafers, and is manually transported to a conveying trolley, and then the conveying trolley is pushed into a process furnace for corresponding process treatment. Since the wafer boat is heavy after loading silicon wafers, manual handling is labor-intensive and inefficient, and improper operation is prone to problems such as inaccurate placement of the w...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677H01L21/683
Inventor 刘昊泽戴秋喜潘加永
Owner 苏州映真智能科技有限公司