Device for preparing large-area periodic micro-nano structures through dual femtosecond laser beam cylindrical lens convergence interference

Abstract

The invention discloses a device for preparing large-area periodic micro-nano structures through dual femtosecond laser beam cylindrical lens convergence interference. The device is characterized in that a sample is fixed to a precisely moving five-axis horizontal moving table, the polarization direction is changed by a half wave plate, a Gauss beam output by a femtosecond laser light source is divided into two lasers with the strength ratio of 1:1 by a beam splitter, and the lasers are converged by two beam cylindrical lenses to form interference. The laser power, the polarization direction,the same time of the two lasers, shutter release, the sample moving direction, the sample moving speed and the like are completed by a computer control system. Dual-beam interference is achieved through a cylindrical lens convergence scheme, and the regular and large-area periodic stripe nanostructures can be prepared. The device has the advantages of convenient and fast operation, economical efficiency, high efficiency, high anti-jamming capability and the like and can be used for preparing the metal and semiconductor micro-nano grating structures in a large-area mode, the optical propertiessuch as absorption, luminescence, coloring and the like of the material surfaces are regulated and controlled, and the wettability of the material surfaces is regulated and controlled, for example, hydrophobicity, water shrinkage, lipophobicity and oil shrinkage of the material surfaces are regulated and controlled.

Description

technical field [0001] The invention relates to the technical field of laser preparation of micro-nano structures, in particular to a device for preparing large-area periodic micro-nano structures by converging and interfering double femtosecond laser beam cylindrical lenses. Background technique [0002] Femtosecond laser direct writing can easily induce periodic nanostripes, particles and other structures on the surface of metals, semiconductors, transparent materials, polymers, etc. Surface coloring, sub-wavelength anti-reflection, etc. However, there are two problems in the preparation of periodic nanostripe structures by direct writing. One is that when preparing large-area periodic micro-nano structures, there are many problems such as irregular stripes such as crossing, bifurcation, and fracture; the other is that the processing speed of external laser direct writing is slow and the processing efficiency is low. Using femtosecond lasers to quickly and efficiently pr...

AI Technical Summary

Problems solved by technology

One is that when preparing large-area periodic micro-nano structures, there are many problems such as irregular stripes such as crossing, bifurcation, and fracture; the other is that the processing speed of external laser direct writing is slow and the processing efficiency is low.

Images