Laser in-situ processing equipment and method based on scanning galvanometer
A scanning galvanometer and processing method technology, applied in image analysis, instruments, calculations, etc., can solve the problems of cumbersome operation process, difficult to ensure processing accuracy and efficiency, and difficult to ensure placement accuracy, so as to improve accuracy and efficiency, improve Function integration efficiency and utilization effect
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[0033] The present invention will be further described below in conjunction with the accompanying drawings.
[0034] like figure 1 As shown, the laser in-situ processing equipment based on the scanning galvanometer provided by the present invention includes an industrial camera 4, a five-axis motion platform 2, a laser 9, an industrial control computer 12, and a two-dimensional galvanometer 5 and a dynamic focusing mirror 6. A three-dimensional vibrating mirror 7 is composed; wherein, the laser 9 is used to emit laser light or indicating light 8 of corresponding wavelength, which passes through the dynamic focusing mirror 6 and the two-dimensional vibrating mirror 5 in turn, and focuses on the five-axis motion platform 2; the five-axis motion platform 2 It is used to adjust the pose of the workpiece 3 on it; the industrial camera 4 is used to obtain the spot position of the laser or indicating light 8 on the five-axis motion platform 2; the industrial control computer 12 is us...
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