Glass thinning and coating method and equipment

Abstract

The invention discloses a glass thinning and coating method, which comprises the following steps of: fixing a substrate on a substrate frame, feeding the substrate frame into an inlet chamber, sealing, and performing low-vacuum pumping; feeding the substrate frame into an inlet buffer chamber, and carrying out high-vacuum pumping; then feeding the substrate frame into an inlet conveying chamber, preheating the substrate under high vacuum; sending the substrate frame into a process chamber, carrying out coating treatment, heating the substrate during coating, and keeping the temperature of thesubstrate at 150-250 DEG C; and sending the coated substrate out. The invention further discloses glass thinning and coating equipment which sequentially comprises an inlet chamber, an inlet buffer chamber, an inlet conveying chamber, a process chamber, an outlet conveying chamber, an outlet buffer chamber and an outlet chamber, the equipment further comprises a vacuum pump, the vacuum pump is a molecular pump, and the molecular pump is mounted on a door plate; and the inlet buffer chamber, the inlet conveying chamber, the process chamber, the outlet conveying chamber and the outlet buffer chamber are all provided with heating devices.

Description

technical field [0001] The invention relates to the technical field of glass coating structures, in particular to a glass thinning coating method and equipment. Background technique [0002] Coated glass is also called reflective glass. Coated glass is coated with one or more layers of metal, alloy or metal compound films on the surface of the glass to change the optical properties of the glass to meet certain requirements. Coated glass can be divided into the following categories according to the different characteristics of the product: heat reflective glass, low-emissivity glass (Low-E), conductive film glass, etc. [0003] With the trend of increasing size and thinning of electronic consumer products such as mobile phones and tablet computers, the requirements for thinning glass substrates will increase day by day. [0004] After the display panel is thinned, it has two main advantages: the thickness of the panel is reduced (at least 40% at the current stage); the qual...

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Problems solved by technology

[0006] The current conductive glass production line can be classified into two categories: the first category is that there are coating targets on both sides of the equipment, and there are fewer targets, which is suitable for the production of traditional conductive glass. This type of equipment cannot produce multi-layer film products or high-transparency products. Type of products, but the production of conventional products has a high output. The second type is that the equipment is equipped with coating targets on one side, with more target positions and a large number of vacuum chambers. In addition to products, due to the increase in target positions, high-permeability film products and multi-layer film products can also be produced, but compared with the previous type of equipment, the output is halved, and the design of these two types of equipment is basically based on small-sized glass considerations, but the output Low, coating utilization rate is not high, and for ultra-thin glass, its yield rate is not high, easy to breakage in the production process, the above two types of equipment have the following shortcomings:

[0007] 1. Although the output of the first type of equipment is high, the product coverage is narrow, which is not conducive to the upgrading of the company's products; the second type of equipment covers a wide range of products, but the output is too low to improve production efficiency

That is, the scope of application is narrow and the output is low, which is not conducive to product expansion

[0008] 2. The design of these two types of equipment is based on the 355.6X406.4mm size product as the mainstream standard product, so the design of the substrate holder and fixture is based on the 355.6X406.4mm size. The beams are welded together, so when the size of the glass changes, there will be a phenomenon that the clamps are misplaced or a piece of glass spans two clamps, which may easily cause glass scratches or fall off due to insufficient clamping

In order to avoid the above situation, it is possible to design corresponding crossbeam fixtures for products of different sizes, so that when the product is replaced, the entire set of crossbeams needs to be replaced, which delays production, takes a long time and costs high; for glass with a slightly larger size, the utilization rate of the effective area of ​​the coating is low , which directly leads to the extremely low output of these two types of equipment to produce slightly larger glass

Mainly suitable for small size glass, not suitable for large size glass

[0009] 3. The design of the substrate frame and target position of these two types of equipment is perpendicular to the horizontal plane. This design can fully meet the production needs for small-sized thick glass (1.1mm, 0.7mm, etc.), but for the third generation Thin glass (0.4mm, 0.33mm) of the above size, if clamped in this way, will easily cause the glass to bend and break, and during the walking process of the substrate holder, the glass will vibrate due to the slight instability of the transmission, making the The glass is easy to rub against the heater and other parts in the cavity

Therefore, these two types of equipment are not suitable for the production of large-size thin glass

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