Carbon nanotube film and preparation method thereof
A carbon nanotube film, carbon nanotube technology, applied in nanotechnology, chemical instruments and methods, carbon compounds, etc., can solve the problems of low degree of axial orientation, inability to maintain structural stability, etc. Good chemical potential and structural self-sustainability
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[0028] The present invention also provides a preparation method of the carbon nanotube film, the preparation method comprises the following steps:
[0029] In the first step, the non-array carbon nanotube material is grown on the silicon wafer by using the ion reactive etching method and the water-assisted chemical vapor deposition method. Specifically, by controlling the reaction gas flow rate, growth time and other conditions, the power of the ion reactive etching is 18W, the gas source is Ar, the growth temperature of the water-assisted chemical vapor deposition method is 750 ° C, C 2 H 4 The flow rate is 100sccm, and the growth time is 20min; the prepared non-array carbon nanotube material is mainly composed of 3-wall (average diameter of 8.1nm) carbon nanotubes, and the purity is as high as 99.98%. The length of the carbon nanotubes is greater than 800μm, and the density About 9.7mg / cm 3 .
[0030] In step 2, the prepared non-array carbon nanotube material is peeled of...
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[0033] Example 1
[0034] The preparation method of the carbon nanotube film provided by the first embodiment of the present invention mainly includes the following steps:
[0035] (1) The silicon wafer (5 cm in diameter) was ultrasonically cleaned in ethanol for 10 min to remove dust on the surface, and then blown to a dry state with nitrogen. After the catalyst film is plated on the silicon wafer, the density of the catalyst is reduced by the ion reaction etching method, and the non-array carbon nanotube material is grown in a tube furnace (750 ℃). The prepared non-array carbon nanotube material is mainly composed of 3 Wall (average diameter is 8.1nm) composed of carbon nanotubes, the purity is as high as 99.98%, the length of carbon nanotubes is greater than 800μm, and the density is about 9.7mg / cm 3 .
[0036] (2) peeling off the non-array carbon nanotubes from the silicon wafer, and preparing a carbon nanotube film with a nano-groove structure through a mechanical drawi...
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