High-temperature micro-nano indentation testing device and method with inert gas protection function

Abstract

The invention relates to a high-temperature micro-nano indentation testing device and method with an inert gas protection function, and belongs to the field of electromechanical integration precisioninstruments. The device consists of a thermal insulation unit, an inert atmosphere heating unit, a macro adjustment-precision loading unit, a microimaging unit, an XY precision displacement platform and a marble base. The XY precision displacement platform drives the thermal insulation unit, the inert atmosphere heating unit and a test sample to perform displacement on an XY direction so as to replace a press-in point and to adjust a microimaging position. The high-temperature micro-nano indentation testing device provided by the invention can test the micro-nano indentation response and mechanical properties of a material under the condition of inert gas protection at the environment of the room temperature to a high temperature environment of a 800 DEG C, and can perform in situ observation and measurement on the surface topography and deformation damage of an indentation area of the test sample of the material under the action of a high temperature in combination with a coaxial microscope with a filtering lens. The high-temperature micro-nano indentation testing device has the advantages of compact structure, high modularity, high test precision, controllable environment atmosphere and convenient operation and use, and so on.

Description

technical field [0001] The present invention relates to the field of mechatronic precision instruments, in particular to a high-temperature micro-nano indentation testing device and method with an inert gas protection function, which provides a basis for studying the micro-mechanical behavior, deformation damage mechanism and performance evolution law of materials in high-temperature environments Effective technical means have broad application prospects in the fields of aerospace, material science and iron and steel metallurgy. Background technique [0002] Obtaining the mechanical properties of materials is an important condition for the application of new materials, but with the development of micromechanics and microelectronics technology and the extensive application of thin film and coating materials, the feature size is getting smaller and smaller, and traditional mechanical testing technology can no longer meet the needs of new materials. The acquisition of mechanica...

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Problems solved by technology

[0003] Since the mechanical properties of materials such as engine turbine blades and rocket nozzles serving in high-temperature environments are greatly affected by the temperature field, the mechanical properties obtained by conventional tests are often unable to guide their application in service environments. Therefore, the force-thermal coupling Mechanical performance testing under loading conditions is critical

Because the oxidation of materials at high temperatures will have a great impact on the test results, the current high-temperature micro-nano indentation test devices at home and abroad are usually placed in a closed vacuum chamber or atmosphere chamber, which is not conducive to the operation of the operator and greatly increases the cost

At the same time, due to the influence of temperature field and thermal radiation at high temperature,

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