Multifunctional three-dimensional biological microprobe using stainless steel as base material and preparation method thereof

Abstract

The invention provides a multifunctional three-dimensional biological microprobe using stainless steel as a base material and a preparation method thereof. The biological microprobe comprises a probehead, a probe rod and a probe handle, wherein the probe head is connected to the probe handle through the probe rod to form a three-dimensional microprobe. The probe head, the probe rod and the probehandle all take stainless steel as a base material, and one side is sequentially coated with an organic polymer insulating layer and an oxide insulating layer, the other side is coated with an organicpolymer protective layer; a probe measuring area is provided with a thin-film thermocouple node and an electrical detection electrode; an external lead-out pad is arranged on the probe handle. The microprobe further comprises a lead-out wire, one end of the lead-out wire is connected with the thin film thermocouple node or an electric detection electrode on the probe measuring area, and the otherend of the lead-out wire is connected with an external lead-out pad on the probe handle. The biological microprobe has the functions of simultaneously monitoring and regulating potential electrical and temperature signals, sufficient mechanical strength, good elasticity and good biocompatibility.

Description

Technical field [0001] The invention belongs to the technical field of microelectronic mechanical systems and weak signal measurement, and particularly relates to a multifunctional three-dimensional biological microprobe using stainless steel as a base material and a preparation method thereof. Background technique [0002] The research of biological microprobes is of great significance to the development of many technologies such as brain-computer interface technology, neurorehabilitation, disease diagnosis and treatment. Many countries in the world attach great importance to the development of this research direction. Therefore, in recent years, research in this direction has achieved a number of top scientific research and application results. [0003] Although many achievements have been made in biological microprobes, the existing biological microprobes still have problems such as single function, non-coexistence of structural strength and elasticity, and inability to balance ...

AI Technical Summary

Problems solved by technology

[0003] Although biological microprobes have made many achievements, the existing biological microprobes still have problems such as single function, non-coexistence of structural strength and elasticity, and unbalanced mechanical properties and biocompatibility.

In terms of function, most of the existing biological microprobes can only monitor electrical signals or a single other physiological signal, and there are few biological microprobes that integrate multiple functions; in terms of structural strength, biological microprobes The needle needs to be implanted into the biological body during application, so the entire probe needs to have sufficient mechanical strength to ensure that it can be smoothly implanted into the target position of the biological body. Sufficient mechanical strength means that the probe has sufficient rigidity. Existing Most of the rigid biological microprobes are based on silicon materials, glass materials or polymers. Such microprobes are easy to break during use due to their lack of elasticity; in terms of biocompatibility, biological microprobes record biological The signal needs to have better biocompatibility. Biological microprobes based on silicon and glass have greater mechanical strength, but their biocompatibility is insufficient. Biological microprobes based on organic polymers have relatively high mechanical strength. Good biocompatibility but its mechanical strength is not enough to penetrate the muscle or tissue of the organism to reach various parts of the organism for the measurement of physiological signals

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