K-type single-pole four-throw radio frequency MEMS switch

A radio frequency switch, single-pole four-throw technology, applied in the field of radio frequency MEMS, can solve the problems of high driving voltage, poor insertion loss, complex structure, etc., and achieve the effects of small insertion loss, improved life, and small size

Pending Publication Date: 2019-08-16
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For example, the Nanjing Institute of Electronics Technology designed a RF MEMS single-pole four-throw rectangular switch. This switch consists of a five-port m

Method used

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  • K-type single-pole four-throw radio frequency MEMS switch
  • K-type single-pole four-throw radio frequency MEMS switch
  • K-type single-pole four-throw radio frequency MEMS switch

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Embodiment Construction

[0039] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0040] In the description of the present invention, it should be understood that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right" etc. are based on the attached The orientation or positional relationship shown in the figure is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred combination or element must have a specific orientation, be constructed and operated in a spec...

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Abstract

The invention belongs to the field of radio frequency MEMS, in particular to a K-type single-pole four-throw radio frequency MEMS switch. The K-type single-pole four-throw radio frequency MEMS switchis mainly composed of a substrate, a microwave transmission line, a driving electrode, an upper electrode, a lower electrode, a fixed anchor and contacts. The microwave transmission line and the driving electrode are arranged on the substrate. The upper electrode is of a straight plate structure, and the lower electrode is a double contact with an elastic beam. The microwave transmission line usesa power divider of a K-type structure to divide the input signal power into four equal signals for output. From the point of view of microwave transmission, the K-type structure is more efficient, and improves the smooth flow of current and the transmission performance between branches of the switch. The designed single-pole four-throw switch has smaller insertion loss and better isolation. In addition, release holes in cantilever beams reduce the stress on the whole cantilever beams and greatly improves the isolation of the switch.

Description

technical field [0001] The invention belongs to the field of radio frequency MEMS, and in particular relates to a K-type single-pole four-throw radio frequency MEMS switch. Background technique [0002] As a kind of miniature electronic components, RF MEMS switch is a key component in high-frequency communication systems, and it controls the on-off of signals through external driving. Compared with traditional semiconductor switches, it has excellent advantages such as high frequency, low loss, small size, long life, and easy integration. It can be widely used in various radio frequency, microwave and millimeter wave communication systems, and is of great significance to high-speed wireless communication systems. [0003] RF MEMS switches can be divided into single-pole single (multiple) throw switches and single (multiple) pole single-throw switches according to their signal processing methods. The single-pole single (multiple) throw switch outputs from one or more channe...

Claims

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Application Information

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IPC IPC(8): H01P1/10
CPCH01P1/10
Inventor 吴倩楠王姗姗李孟委李强韩路路
Owner ZHONGBEI UNIV
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