Active component substrate
A technology of active components and substrates, applied in electrical components, semiconductor devices, electric solid-state devices, etc., can solve the problems of high cost, multi-process time, complicated process steps, etc.
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[0075] Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:
[0076] figure 1It is a schematic top view of an active device substrate according to an embodiment of the present invention. Figure 2A to Figure 2I It is a schematic top view of the manufacturing process of the active component substrate according to an embodiment of the present invention, wherein Figure 2A to Figure 2I correspond figure 1 The region R1. Figure 3A to Figure 3I It is a schematic cross-sectional view of the manufacturing process of the active element substrate according to an embodiment of the present invention, wherein Figure 3A to Figure 3I correspond Figure 2A to Figure 2I The section lines A-A' and B-B'.
[0077] Please refer to figure 1 , Figure 2I as well as Figure 3I The active device substrate 100 includes a substrate 110, has an active region 100a and a peripheral region 100b outside the ...
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