Preparing and detecting method for micro-nano light controlled actuator based on micro cantilever array sensing technology

Abstract

The invention relates to a preparing and detecting method for a micro-nano light controlled actuator based on a micro cantilever array sensing technology. The method comprises the following steps: coating a micro cantilever array with a photo-responsive material by using a capillary tube; to be specific, using the first cantilever beam as a control group and modifying the second to eight micro cantilever beams with photo-responsive materials having different concentrations; illuminating the photo-responsive materials alternately by using an ultraviolet light source and a visible light source and making the materials make photo-isomerization to cause bending of the cantilever beams, and thus realizing preparation of a light controlled actuator; irradiating free ends of the micro cantileverarray by laser, forming light spots on a photoelectric position sensitive detector by reflected rays, causing displacement of the light spots by bending of the micro cantilever beams, and detecting the displacement of the light spots to realize detection of the surface stress of the micro beam. With full utilization of advantages of micron-order sizes of the micro cantilever beams, real-time performances, and stress trace detection and the like, the preparation and performance detection of the micro-nano light controlled actuator are realized by combining the photo-isomerization characteristics of photo-responsive materials.

Description

technical field [0001] The invention relates to the field of light-controlled actuators, in particular to a preparation and detection method of a micro-nano light-controlled actuator based on micro-cantilever array sensing technology. Background technique [0002] In nature, sensing changes in environmental stimuli and converting them into movement is a vital function of many organisms, such as the phototropic movement of tendrils in climbing plants and the capture of insects in carnivorous plants. Inspired by these plant-prone movements, scientists have designed and actuated a series of actuators (or actuators) based on stimuli-responsive smart materials for applications in different fields, such as polymer "motors", artificial muscles, micro-robots, light control microfluidics, oscillators and generators, etc. [0003] Among many smart materials, photoresponsive materials are increasingly used in actuators due to their unique environmental protection, remote controllabili...

AI Technical Summary

Problems solved by technology

However, as a highly sensitive sensing technology, there are very few studies on micro-nano optically controlled actuators using micro-cantilever sensing technology.

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