Five-degree-of-freedom error synchronous measurement device and method for linear motion system

Abstract

The invention discloses a five-degree-of-freedom error synchronous measurement device and method for a linear motion system; the device comprises a fixed emission unit, a movement measurement unit anda signal processing unit; optical signals detected by four two-dimensional PSD position-sensitive sensors are connected with an upper computer through a USB after passing through a signal processingcircuit, an inclination angle sensor is in communication with the upper computer through the Bluetooth, and the straightness of the horizontal direction, the straightness of the vertical direction, the pitching angle, the deflection angle and the roll angle error of the linear motion system can be obtained by decoupling through processing of a measurement analysis module. According to a strict position relation design, the influence of optical element assembly errors on the measurement result can be ignored. All the measurement data are directly measured by the sensor instead of being obtainedthrough indirect calculation by establishing a complex mathematical model, so that the error caused by using complex mathematical calculation is reduced.

Description

[0001] 【Technical field】 [0002] The invention belongs to the field of geometric motion precision measurement of a precision linear motion axis, and relates to a device and method for synchronously measuring five-degree-of-freedom errors of a linear motion system. [0003] 【Background technique】 [0004] Rolling linear guides are the most commonly used form of linear guides in high-end precision equipment. Taking machine tools as an example, in a typical linear motion system, there are large base support parts for installing guide rails, two or more guide rails, and on each guide rail. Both are equipped with several sliders, a mobile linear motion system table mounted on the sliders, and components such as lead screws, bearings, and servo motors for driving the linear motion system table. There are always six geometric motion errors in the linear motion system when feeding: positioning error Δz along the direction of motion, horizontal straightness error Δx perpendicular to th...

AI Technical Summary

Problems solved by technology

[0006] Traditional laser interferometry instruments can only measure one error each time, resulting in repeated disassembly and assembly of measurement components, affecting measurement efficiency

Simultaneous detection of multi-degree-of-freedom errors can be achieved through four or more laser trackers, but the measurement results are obtained indirectly through the machine tool motion model, and the complicated mathematical calculation process will lead to unnecessary measurement errors

The existing multi-degree-of-freedom error simultaneous measurement system has a complex optical path, involves many optical components, is expensive, and the optical path adjustment is complicated and cumbersome

For most multi-degree-of-freedom measurement systems, factors such as laser beam drift and crosstalk between various errors have an impact on the final measurement results. At present, there is no effective error compensation model, and there is always a problem in improving measurement accuracy. Some defects, can not meet the actual needs well

The moving part of many measurement systems is connected to the cable, which affects its actual engineering use

In addition, when the existing multi-degree-of-freedom error measurement system establishes a mathematical model, it does not take into account the unification of the measured data and the error of the linear motion system of the machine tool, which cannot guarantee the movement center of the measurement model and the actual motion of the linear motion system table. The center is consistent, and the measurement data cannot be used effectively and reasonably to correctly evaluate the performance of the machine tool

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